AZO与ITO薄膜电磁散射特性对比试验研究  

Electromagnetic Scattering Characteristics of AZO and ITO Coatings: An Experimental Study

作　　者：刘战合 王晓璐 王菁 姬金祖[2] 周鹏 赵辉 Liu Zhanhel;Wang Xiaolu;Wang Jing;Ji Jinzu;Zhou Peng;Zhao Hui(School of Aeronautic Engineering,Zhengzhou University of Aeronautics,Zhengzhou 450046,China;School of Aeronautic Science and Engineering, Beihang University, Beijing 100191, China;School of Electronics and Communication Engineering, Zhengzhou University of Aeronautics, Zhengzhou 450046, China)

机构地区：[1]郑州航空工业管理学院航空工程学院,郑州450046 [2]北京航空航天大学航空科学与工程学院,北京100191 [3]郑州航空工业管理学院电子通信工程学院,郑州450046

出　　处：《真空科学与技术学报》2018年第4期313-319,共7页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然基金项目(11702255);航空科学基金项目(2016ZA55001;2015ZD55005);郑州航空工业管理学院青年骨干教师资助计划项目(2017-12);河南省科技攻关计划(182102210444;162102210089)

摘　　要：基于非平衡磁控溅射技术在浮法玻璃表面沉积了系列掺铝氧化锌(AZO)和氧化铟锡(ITO)薄膜,从电磁隐身角度出发,确定了两种薄膜的电磁散射测试方法和分析方法,并测试了10、15 GHz的HH、VV的极化雷达散射截面(RCS)曲线,以试验数据为基础,研究了方块电阻对两种薄膜电磁散射的影响特性。试验结果表明,AZO与ITO散射曲线具有相似性,AZO散射曲线震荡性更明显;两种薄膜RCS增益随着方块电阻的增大而变小,AZO和ITO的RCS增益曲线均震荡性降低;方块电阻合适时,两种薄膜均可实现座舱玻璃隐身。Herein, we reported the electromagnetic stealth behavior of the Al-doped zinc oxide （AZO） and in- dium tin oxides （ITO） coatings, deposited by unbalanced magnetron sputtering on glass substrate. The influence of the sheet resistance and transmittance on the electromagnetic scattering of the AZO/ITO coatings was theoretically analyzed and experimentally evaluated by measuring the Radar Cross-Section （CRS） ,irradiated at 10 GHz/15 GHz and polarized in Horizontal-Horizontal （HH）/Vertical-Vertical （VV） modes. The results show that the sheet re- sistance strongly affected the RCS curves with similar structures of the AZO/ITO coatings. For example, as the sheet resistance increased, their RCS gains oscillatingly decreased, with that of AZO film oscillating more obviously. We suggest that the AZO and ITO coatings with the optimized sheet resistance may do an excellent job for cockpit glass stealth.

关 键 词：掺铝氧化锌 氧化铟锡 薄膜 电磁散射 雷达散射截面 

分 类 号：TB43[一般工业技术] TN011[电子电信—物理电子学]