一种基于压电堆栈的惯性纳米步进马达（英文）  

A Simple Stable Inertial Nanopositioner with Piezoelectric Stacks

作　　者：庞宗强[1] 张悦[1] 周泽清 戎舟[1] Pang Zongqiang;Zhang Yue;Zhou Zeqing;Rong Zhou(College of Automation, Nanjing University of Posts and Telecommunications, Nanjing 2 10 00 3 , China)

机构地区：[1]南京邮电大学自动化学院,南京210003

出　　处：《纳米技术与精密工程》2018年第1期23-27,共5页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金青年基金资助项目(11604158,61701250)

摘　　要：为了搭建出结构简单、性能稳定的纳米步进马达,从而降低扫描探针显微镜系统搭建的复杂度,本文描述了一款新型的基于压电堆栈的惯性纳米步进马达.仅利用两组压电堆栈和一路锯齿波电压信号即可实现该马达的纳米级步进.其中,两组压电堆栈按照伸缩方向平行固定于基座上,绝缘导轨粘接固定于两组压电堆栈自由端的中间,利用4个氮化硅圆球和铍铜弹簧片将滑杆通过挤压方式固定于绝缘导轨内侧.通过给两组压电堆栈施加一路锯齿波电压信号,利用滑杆自身的惯性作用,即可控制绝缘导轨带动滑杆产生纳米级步进.实验结果表明,此款惯性纳米步进马达可以实现任意角度的纳米级精度位置微调和厘米级范围的粗调.此款纳米步进马达结构紧凑,工作性能稳定,非常适合于在精密光学系统和极端条件下的扫描探针显微镜系统中使用.To build a simple and stable nanopositioner which can reduce the complexity of the scanning probe microscopy （SPM） system, a novel inertial nanopositioner with piezoelectric stacks is presented. The nanopositioner adopts two piezoelectric stacks and one sawtooth driving signal to achieve movement. The two piezoelectric stacks are set in the adjustable direction, and are then fixed on the base. The insu-lated rail is fixed between the free sides of the two piezoelectric stacks, and the central shaft is pressed by four SiN balls and one CuBe spring in the insulated rail. By applying one sawtooth wave on the piezoelec-tric stacks, the insulated rail can drive the central shaft to move a nanometer in distance due to its iner- tance. Experimental results indicate that the nanopositioner can realize nanometer precision fine-tuning and centimeter range coarse adjustment in any direction. The nanopositioner enjoys high compactness and excellent mechanical stability, so it can be easily implanted into precision optical systems and SPM sys-tems.

关 键 词：纳米步进马达 压电堆栈 惯性 锯齿波 

分 类 号：TH7[机械工程—仪器科学与技术]