串联式二维微定位平台的设计  

The Design of Tandem Two Dimensional Micro Positioning Platform

作　　者：崔志勇 黄卫清 孙梦馨 王寅[3] CUI Zhi-yong;HUANG Wei-qing;SUN Meng-xin;WANG Yin(College of Aerospace Engineering Nanjing University of Aeronautics ＆ Astronautics, Jiangsu Nanjing 210016, China;School of Mechanical and Electric Engineering Guangzhou University, Guangdong Guangzhou 510006, China;College of Mechanical Engineering and Automation Huaqiao University, Fujian Xiamen 361021, China)

机构地区：[1]南京航空航天大学机械结构力学及控制国家重点实验室,江苏南京210016 [2]广州大学机械与电气工程学院,广东广州510006 [3]华侨大学机电及自动化学院,福建厦门361021

出　　处：《机械设计与制造》2018年第A01期88-91,共4页Machinery Design & Manufacture

基　　金：中航工业产学研项目(CXY2013NH09);国家自然科学基金项目(51375224);国家自然科学基金(50735002);华侨大学高层次人才科研启动费资助项目(15BS102);江苏省自然科学基金(BK20140474)

摘　　要：设计了一种基于桥式放大原理的出串联式二维微定位平台,通过理论分析与实验数据相对比,对平台的刚度、输出位移、精度以及其固有频率进行了分析与验证。首先,根据桥式放大原理设计了单向的运动机构,将两个单向机构通过串联方式连接实现二维的独立运动。然后,对单向运动机构建立理论模型,求其等效刚度和理论固有频率。最后,通过有限元仿真和实验分析,对二维平台的输出性能和模态进行验证。实验结果表明:在低频率工作状态下(100Hz以内)二维平台的输出位移与输入电压成良好的正比例关系且两方向的输出性能相似,测得最小分辨步进位移(即精度)为50nm。The paper design a 2D micro positioning platform based on the tandem amplification principle by series connection, through comparing the theoretical analysis and the experimental data, then the platform＇s output displacement, stiffness, accuracy and the natural frequencies are analyzed and validated. Fist, a one-way movement mechanism is designed according to the principle of bridge amplification, and the two independent mechanisms are connected in series to achieve two- dimensional independent motion. Then, a theoretical model is established to determine the equivalent stiffness and theoretical natural frequency of the one-way mechanism. Finally, the output performance and mode of the two dimensional platform are verified by finite element simulation and experimental analysis. The experimental results show that： the 2D platform＇s output performance have linear relationship with input voltage, and the output performance in the two directions is similar, measured the minimum distinguishable step is 50nm.

关 键 词：微定位平台 桥式放大 串联 压电陶瓷 固有频率 

分 类 号：TH16[机械工程—机械制造及自动化] TB535[理学—物理]