非对称阳极结构的半超结功率二极管  

The Semi-super Junction Power Diode With an Asymmetric Anode Structure

作　　者：谢加强[1] 马丽[1] 高勇[1] 王逍遥 XIE Jia-qiang;MA Li;GAO Yong;WANG Xiao-yao(Xi＇ an University of Technology, Xi＇ an 710048, China)

机构地区：[1]西安理工大学电子工程系,陕西西安710048 [2]西安电力电子技术研究所,陕西西安710061

出　　处：《电力电子技术》2018年第5期89-92,共4页Power Electronics

基　　金：国家自然科学基金(51177133);陕西省教育厅特殊科研项目(2013JK1105)~~

摘　　要：通过将功率二极管改变为非对称阳极结构及优化超结深宽比等参数来提升器件的性能。分析了其动态特性和静态特性变化规律。结果表明深宽比由1.3增大到6.6时,反向恢复峰值电流减小10%左右;在适当调整阳极区掺杂浓度后,其反向恢复时间缩短30%,反向恢复峰值电流减小20%。在同等工艺参数下,击穿电压提升约60%。此外,动态特性和击穿电压的提升对二极管的正向导通特性几乎没有影响。The structure and characteristics of the device are optimized by changing the parameters such as asymmetric anode and super-junction aspect ratio.The dynamic and static characteristics are analyzed.The results show that the aspect ratio increases from 1.3 to 6.6,the reverse recovery peak current is reduced by about 10%.After adjusting doping concentration of the anode area, the reverse recovery time shorted by 30%, reverse recovery peak current reduced by 20%.In the same process conditions,the breakdown voltage is increased by 60%.In addition,the enhancements of dynamic characteristics and the breakdown voltage do not change the forward characteristics of the diode.

关 键 词：二极管 非对称阳极 半超结 深宽比 

分 类 号：TN31[电子电信—物理电子学]