零差干涉仪用于振动校准中关键技术的研究  

Study on Key Technologies of Vibration Calibration Using Homodyne Interferometer

作　　者：胡红波[1] 杨丽峰[1] 于梅[1] HU Hong-bo, YANG Li-feng, YU Mei(National Institute of Metrology, Beijing 100029, Chin)

机构地区：[1]中国计量科学研究院,北京100029

出　　处：《计量学报》2018年第3期368-372,共5页Acta Metrologica Sinica

摘　　要：针对零差干涉仪用于低频振动校准中数据量过大的问题,分析了其输出干涉信号的特点,采用了一种动态相位的展开算法,该算法利用了振动过程中加速度量的信息,能够大大降低频振动校准时对采样率的需求,从而有效地减小了采集时的数据量。针对正弦振动参数计算的问题,采用了基于最小二乘算法的参数递推算法,既能避免参数计算是矩阵求逆等运算操作,还能实现参数的实时计算。结果表明,利用本文所述方法能够有效地拓宽零差干涉仪用于低频振动测量时的频率下限。For the problem of huge data encountered when homodyne interferometer is used in low frequency vibration calibration, first the properties of the spectrum of the interference is described, and then a dynamic successive phase unwrap algorithm is used, this method requires information about acceleration in the process. Based on this method, the sampling rate can be heavily reduced with losing information and a small capacity of data. During the process of the amplitude and phase angle estimation, a reeursive method of least squares is recommended, with this method not only the computation of matrix inverse can be avoided, but also value of the parameters can be calculated online. To sum up, the methods proposed can broaden the low frenuencv range for vibrntion calibration using homodyne interferometer.

关 键 词：计量学 振动校准 零差干涉仪 相位展开 正弦拟合 

分 类 号：TB936[一般工业技术—计量学]