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作 者:宋斌[1] 曹文杰 尤庆亮[1] SONG Bin;CAO Wenjie;YOU Qingliang(School of Chemistry and Environmental Engineering,Jianghan University,Wuhan 430056,Hubei,Chin)
机构地区:[1]江汉大学化学与环境工程学院,湖北武汉430056
出 处:《江汉大学学报(自然科学版)》2018年第3期231-237,共7页Journal of Jianghan University:Natural Science Edition
摘 要:为了制备平整的氧传感器芯片空气孔道,采用了丝网印刷的方法。相应配制了一种适印性的炭浆,优化的条件为:优选了活性炭和松油醇、最佳的球磨级配为m_(Φ6.5)∶m_(Φ3)=1∶2、球磨时间为12 h、分散剂含量为30%、胶含量为5%。在优化的条件下制备的空气孔道平整稳定,该制备方法具有精度高、形状平整可控、成本低以及操作简便等优点。In order to prepare the flat air pore canal of the lambda sensor chip, the method of screenprinting was used. A suitable carbon slurry was prepared, and the optimum conditions were as follows:activated carbon and terpineol were chosen, the grading was mΦ6.5∶mΦ3=1∶2, ball milling time was 12 h,dispersant content was 30%, rubber content was 5%. Under the optimal conditions, the smooth and sta-ble air duct was prepared. The method has the advantages of high precision, controllable shape, low costand simple operation.
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