一种基于MEMS反射镜的平视显示器  

A Kind of Flat View Display Based on MEMS Reflector

作　　者：闫思齐 姜苈峰[1] YAN Siqi;JIANG Lifeng(Aviation University Air Force,Changchun Jilin 130022)

机构地区：[1]空军航空大学

出　　处：《河南科技》2018年第7期54-55,共2页Henan Science and Technology

摘　　要：MEMS反射镜由1mm的反射镜板和四个静电斥力致动器构成.MEMS反射镜使用表面微加工工艺PolyMUMPs制造而成, 包括四个致动器的MEMS反射镜的整体尺寸是3.5mm×3.5mm, 体积非常小.每个执行器可以通过改变施加的电压单独控制.在操作中, 改变一个或两个执行器的电压会使镜片朝所需的方向倾斜.The MEMS reflector is composed of a 1 millimeter reflector plate and four electrostatic repulsion actuators. The MEMS mirror is made from the surface micromachining process PolyMUMPs. The overall size of the MEMS reflector, including four actuators, is 3.5mm x 3.5mm, and the size is very small. Each actuator can be controlled individually by changing the applied voltage. In operation, changing the voltage of one or two actuators will tilt the lens in the direction required.

关 键 词：平视显示器 MEMS反射镜 PolyMUMPs 

分 类 号：TN256[电子电信—物理电子学]