非蒸散型薄膜吸气剂的研究现状及应用进展  

Research status and application progress of non-evaporable film getter

作　　者：单睿 齐通通 黎秉哲 郭杰[1] 袁俊[2] SHAN Rui, QI Tongtong, LI Bingzhe, GUO Jie, YUAN(1.Yunnan Normal University, Kunming 650500 ,China; 2. Kunming Institute of Physics, Kunming 650223, Chin)

机构地区：[1]云南师范大学,昆明650500 [2]昆明物理研究所,昆明650223

出　　处：《功能材料》2018年第5期5049-5055,共7页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(61274137);云南省昆明市发展战略重大科技计划资助项目(2016-1-G-02428)

摘　　要：非蒸散型吸气剂薄膜是超高或极超高真空系统获得和维持真空条件的重要材料,近年来吸气剂广泛应用于MEMS真空封装领域。综述了非蒸散型吸气剂的材料体系、研究现状和工程应用,介绍国内外吸气剂薄膜的研究现状、存在的主要问题及发展趋势。讨论了吸气剂在MEMS真空封装系统的工作原理,传统吸气剂在封装领域的挑战,薄膜吸气剂在封装系统遇到的问题和发展趋势。The non-evaporable getter film is an important material for obtaining and maintaining vacuum conditions for ultra-high or extremely ultra-high vacuum systems.In recent years,getter is widely used in MEMS vacuum packaging field.In this paper,the material system,research status and engineering application of nonevaporative getter were reviewed.The research status,the main problems and development trend of the getter film at home and abroad were introduced.The working principle of the getter in the MEMS vacuum packaging system,the challenge of the traditional getter in the field of encapsulation,and the problems and development trends of the film getter in the packaging system were discussed.

关 键 词：非蒸散型吸气剂薄膜 Zr-Co系 研究现状 应用进展 发展趋势 

分 类 号：TQ424[化学工程]