微电子工业园区谐波分析方法研究  

Research on Harmonic Analysis Method in Microelectronics Industrial Park

作　　者：李洁 党晓圆 赖伟[2] LI Jie;DANG Xiao-yuan;LAI Wei(College of Mobile Telecommunications, Chongqing University of Posts and Telecommunications;State Key Laboratory of Power Transmission Equipment and System Security and New Technology, Chongqing University)

机构地区：[1]重庆邮电大学移通学院 [2]重庆大学输配电装备及系统安全与新技术国家重点实验室

出　　处：《化工自动化及仪表》2018年第5期368-371,共4页Control and Instruments in Chemical Industry

基　　金：国家自然科学基金青年科学基金项目(51707024);中国博士后科学基金项目(2017M612909)

摘　　要：对微电子工业园区主要谐波产生设备和谐波影响进行了分析,针对谐波分析方法,提出了采用复序列快速傅里叶变换算法并进行锁相控制,以克服传统FFT算法的缺点,并以微电子工业区某企业实测数据为例进行了谐波分析。The main harmonic generation equipment in microelectronics industrial park and their harmonic effect were analyzed. Aiming at the harmonic analysis method, adopting the fast Fourier transform algorithm of complex sequence and the phase lock control to overcome shortcomings of the traditional FFT algorithm was proposed. Through taking the measured data from a company in the microelectronics industrial park as an example, the harmonic analysis of them was carried out.

关 键 词：电能质量 谐波分析 FFT改进算法 锁相控制 微电子工业 

分 类 号：TM93[电气工程—电力电子与电力传动]