光学面形绝对测量方法仿真和实验研究  

Simulation and Experimental Study of Absolute Measurement Method for Optical Surface

作　　者：孟诗 刘世杰[2] 陈磊[1] 周游[2] 白云波[2] Meng Shi;Liu Shijie;Chen Lei;Zhou You;Bai Yunbo(School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology Nanjing, Jiangsu 210094, China;Key Laboratory of High Laser Materials, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]中国科学院上海光学精密机械研究所强激光材料重点实验室,上海201800

出　　处：《激光与光电子学进展》2018年第5期216-224,共9页Laser & Optoelectronics Progress

基　　金：国家自然科学基金(11602280)

摘　　要：传统光学干涉检测方法为相对检测法,检测精度一般受限于参考面面形精度,利用绝对检测技术可消除参考面面形误差对干涉测量精度的制约,从而可以实现纳米级精度的面形测量。首先介绍了N位旋转平均绝对检测方法和斜入射绝对检测方法;然后对这两种检测方法和面形恢复过程中运用到的三种算法(旋转平均算法、迭代算法、奇偶函数算法)进行了理论推导和模拟仿真分析;最后通过实验验证了这三种方法恢复的面形精度及其可行性,并对各方法的优缺点和适用性进行了分析比较。最终实现了100mm口径平面镜峰谷(PV)值近λ/40的高精度干涉仪标准平晶绝对面形的测量。The traditional optical interference measurement method is relative detection method, and the detection accuracy is generally limited by the accuracy of the reference surface shape. The use of absolute detection technology can eliminate the constraint of the reference surface shape error on the interference measurement accuracy, which can realize the measurement of the surface shape in nanoseale. Firstly, N bit rotation average absolute detection method and oblique incidence absolute detection method are introduced. Then the theoretical derivation and simulation analysis of two detection methods and three algorithms （rotation average algorithm, iteration algorithm, odd even function algorithm） used in the process of surface restoration are carried out. Finally, the recovered surface shape accuracy and feasibility of the three methods are verified by the experiments. The advantage, disadvantage and applicability of each method are analyzed and compared. At last, the absolute surface measurement of mirror with aperture of 100 mm for high precision interferometer standard flat with peak valley （PV） value of nearly λ/40 is achieved.

关 键 词：测量 干涉检测 绝对检测 斜入射 N位旋转平均 

分 类 号：O439[机械工程—光学工程]