焊接结构光纤Bragg光栅土压力传感器设计  

Design of welding structure FBG soil pressure sensor

作　　者：张继军[1] 赵咏梅[1] 张东亮[1] 赵艳[1] 张宝国[1] ZHANG Ji-jun;ZHAO Yong-mei;ZHANG Dong-liang;ZHAO Yan;ZHANG Bao-guo(Northwest Institute of Nuclear Technology, Xi＇ an 710024, China)

机构地区：[1]西北核技术研究所,陕西西安710024

出　　处：《传感器与微系统》2018年第5期84-86,90,共4页Transducer and Microsystem Technologies

摘　　要：针对传统土压力传感器长期稳定性差、抗电磁干扰能力不强以及组网难度大等问题,根据传感器与土介质的匹配原则,设计了一种焊接结构双膜片光纤Bragg光栅(FBG)温度自补偿土压力传感器,可实现温度和土压力2个参量的同时测量。传感器主要由2个膜片与基体组成,膜片与光栅固定柱一次成型,便于加工封装。对传感器灵敏度系数进行了计算分析。根据分析结果,加工封装传感器并对其进行了压力校准及温度自补偿性能实验。实验结果表明:传感器的输出波长分别与温度和压力呈线性关系,压力灵敏度系数为528.1pm/MPa,输出分辨率为0.19%,线性相关度99.988%;在5~45℃内温度灵敏度系数为31.9 pm/℃,线性相关度99.998%,传感器在5~45℃范围内具有良好的温度自补偿能力,其性能参数符合工程应用要求。Aiming at problem that traditional soil pressure sensors are lack of long-term stability, capability of anti-electrumagnetic interferenceis is not strong, and metworking is difficult, a welding-structure dual-diaphragms fiber Bragg grating（FBG） soil pressure sensor with self-compensation is designed,which can realize simultaneous measurement of two parameters of temperature and soil pressure. The sensor consists of dual-diaphragms and substrate. It makes easy packaging that the diaphragm and grating fixed column one take. The sensitivity coefficient is calculated and analyzed. According to analysis result, the packaged sensor is processed and pressure calibration and temperature self-compensation characteristic experiment are carried out. Experimental results indicate that wavelength shows good linear relationship with pressure or temperature respectively. Pressure sensitivity coefficient is 528.1 pm/MPa with a linear fitting of 99. 988 % while output resolution ratio is 0.19 %. Temperature sensitivity coefficient is 31. 9 pm/℃ with a linear fitting of 99. 998 %, at temperature range of 5 - 45 ℃, it has good temperature self-compensation capability, which meet the requirements of engineering application.

关 键 词：光纤BRAGG光栅 土压力传感器 焊接结构 双膜片 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN253[自动化与计算机技术—控制科学与工程]