基于组分调节减小AZO表面等离子体损耗的研究  

Research on Reducement of AZO Surface Plasma Loss Based on Composition Adjustment

作　　者：陈子男 王登魁 魏志鹏 方铉 房丹 王新伟 王晓华 Chen Zinan;Wang Dengkui;Wei Zhipeng;Fang Xuan;Fang Dan;Wang Xinwei;Wang Xiaohua(State Key Laboratory of High Power Semiconductor Lasers, Changchun University of Science and Technology Changchun, Jilin 130022, China)

机构地区：[1]长春理工大学高功率半导体激光国家重点实验室,吉林长春130022

出　　处：《中国激光》2018年第5期121-125,共5页Chinese Journal of Lasers

基　　金：国家自然科学基金(61574022;61504012;61674021;61704011);吉林省科技发展计划(20160519007JH;20160101255JC;20160204074GX;20170520117JH)

摘　　要：在蓝宝石衬底上制备了具有不同铝(Al)掺杂浓度的掺铝氧化锌(AZO)薄膜,并对其进行了紫外-可见吸收光谱、霍尔效应、折射率及介电常数测试,研究了Al组分对AZO薄膜的光电、表面等离子体性质的影响。随着Al组分浓度的逐渐增大,AZO薄膜吸收边发生蓝移且吸收强度逐渐减小,光学损耗减小;同时,载流子浓度与迁移率先增大后减小,而电学损耗先减小后增大。The Al-doped ZnO（AZO）films with different Al doping concentrations are fabricated on the Al2 O3 substrates.The effects of Al composition on the photoelectric and surface plasma properties of AZO films are analyzed by the ultraviolet-visible（UV-Vis）absorption spectra,Hall measurement,refractive index and dielectric constant measurements.With the increase of Al composition concentration,the absorption edge is blue-shifted and the absorption intensity decreases gradually,which means the optical loss is reduced.Meanwhile,the carrier concentration and mobility first increase and then decrease,while the electrical loss first decreases and then increases.

关 键 词：薄膜 表面等离子体 掺铝氧化锌 光学带隙 光学损耗 电学损耗 

分 类 号：O484.1[理学—固体物理] O484.4[理学—物理]