光谱共焦位移传感器色散镜头设计  

Design of dispersion lens for chromatic confocal displacement sensor

作　　者：田雨 刘宾 TIAN Yu;LIU Bin(School of Information and Communication Engineering, Shanxi Key Laboratory of Signal Capturing ＆ Processing,North University of China, Taiyuan 030051, China)

机构地区：[1]中北大学信息与通信工程学院信息探测与处理山西省重点实验室

出　　处：《光学技术》2018年第3期381-384,共4页Optical Technique

基　　金：国家自然科学基金资助项目(61601412,61571404,61471325);山西省自然科学基金资助项目(2015021099)

摘　　要：色散镜头是光谱共焦位移传感器的核心部件,轴向色散与波长之间的线性度直接影响系统的测量精度。研究了轴向色散与玻璃材质之间的关系,结合透镜组光焦度分配公式,分析线性色散产生条件,设计了一款色散镜头;使用ZEMAX进行仿真优化,镜头在500～700nm工作波段范围内,色散范围约为150.34μm,轴向色散与波长线性度通过一元线性拟合分析,判定系数达0.9972,镜头分辨率较高,配合现有的光谱仪使用,传感器分辨率可达纳米级,满足高精度测量要求。The core component of the spectral confocal displacement sensor is the dispersive lens. The linearity between the axial dispersion and the wavelength directly affects the measurement accuracy of the system. By analyzing the relationship between the axial dispersion and the glass material,combined with the distribution formula of lens distribution,a dispersion lens is designed and ZEMAX simulation optimization is used. The set of lens,whose working wavelength range is 500 ～ 700 nm,has a chromatic dispersion range of about 150.34μm. Through the linear regression fitting of axial dispersion and wavelength,it is obtained that the coefficient of determination is 0.9972. So the linearity of measurement is well. With the use of the existing spectrometer,the resolution of the sensor can reach the nanoscale level,which meets the requirements of high precision measurement.

关 键 词：光学设计 光电传感器 色散镜头 ZEMAX 

分 类 号：O439[机械工程—光学工程] O433[理学—光学]