倾斜波面干涉仪中光纤阵列型点源发生器的光程误差标定方法  

Optical Path Difference Calibration Method of Optical Fiber Array Point Source Generator in Tilted-Wave-Interferometer

作　　者：李小柳 沈华[1,2] 李嘉[1,2] 朱雪妍 姚德超 路晴 朱日宏[1,2] Li Xiaoliu;Shen Hua;Li Jia;Zhu Xueyan;Yao Dechao;Lu Qing;Zhu Rihong(School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China;MIIT Key Laboratory of Advanced Solid Laser, Nanjing University of Science and Technology, Nanjing Jiangsu 210094, China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]南京理工大学先进固体激光工业和信息化部重点实验室,江苏南京210094

出　　处：《光学学报》2018年第5期110-115,共6页Acta Optica Sinica

基　　金：中央高校基本科研业务费专项资金(30916014112-007);国家自然科学基金(61775096);南京理工大学本科生科研训练"百千万"省级项目(201610288028X)

摘　　要：分析了光纤阵列型点源发生器相对于透镜阵列型点源发生器的优势。针对光纤阵列型点源发生器各光纤出射光束之间存在初始光程差的问题,提出了基于马赫-曾德尔全光纤干涉仪和小数重合法的光程差检测方法。测量各光束间的光程差并将其引入到倾斜波面干涉系统的误差模型中,以消除其对被测件面形偏差解算的影响。结果表明,该检测系统的测量不确定度为0.07λ_3(λ_3=632.8nm)。分别使用基于光纤阵列的倾斜波面干涉系统和ZYGO干涉仪对抛物面镜片进行测量,二者获得的面形偏差结果一致。The advantages of the optical fiber array point source generator relative to the lens array point source generator are analyzed.An optical path difference detection method based on Mach-Zehnder all-fiber interferometer and excess fraction method is proposed,which can measure the optical path difference of all beams relative to the beam emitted from central fiber.Meanwhile,the measurement influence of optical path difference on surface deviation calculation can be eliminated with introducing it into the mathematical model of tilted-wave-interferometry system.The results show that the measurement uncertainty of this detection system is 0.07λ3（λ3=632.8 nm）.A parabolic mirror is measured with fiber array based tilted-wave-interferometry system and ZYGO interferometer,and the surface deviations obtained by the two interferometers are consistent.

关 键 词：测量 点源发生器 光纤阵列 小数重合法 光程差 

分 类 号：O436[机械工程—光学工程]