太赫兹波段金属阵列结构的透射及反射宽谱偏振特性  

Broad-Band Polarization Characteristics on Transmission and Reflection of Metal Array Structures in Terahertz Region

作　　者：沈云[1] 汪涛 汪云[2] 邓晓华[2] 曹俊诚[3] 谭智勇[3] 邹林儿[1] 代国红 Shen Yun;Wang Tao;Wang Yun;Deng Xiaohua;Cao Juncheng;Tan Zhiyong;Zou Lin＇er;Dai Guohong(Department of Physics, Nanchang University, Nanchang, Jiangxi 330031, China;Institute of Space Science and Technology, Nanchang University, Nanchang, Jiangxi 330031, China;Key Laboratory of Terahertz Solid-State Technology, Chinese Academy of Sciences, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, Chin)

机构地区：[1]南昌大学物理学系,江西南昌330031 [2]南昌大学空间科学与技术研究院,江西南昌330031 [3]中国科学院上海微系统与信息技术研究所中国科学院太赫兹固态技术重点实验室,上海200050

出　　处：《光学学报》2018年第5期123-129,共7页Acta Optica Sinica

基　　金：国家自然科学基金(61405087);上海市科技创新行动计划(15DZ0500103);上海市自然科学基金(17ZR1448300)

摘　　要：基于计算机仿真技术(CST)软件对二维金属光栅阵列在0.1~10THz波段的偏振特性进行了数值分析,利用光刻和金属薄膜工艺在500μm厚的高阻硅衬底上沉积了20nm厚的不同结构周期的金属铜光栅阵列,利用傅里叶变换光谱仪测量了该光栅阵列的透射及反射特性。结果表明:在太赫兹宽谱范围内,该光栅阵列的透射和反射都具有良好的偏振特性,且偏振特性范围可通过调整结构周期进行调节;该研究对太赫兹偏振器的进一步研究及应用提供了参考。On the basis of computer simulation technology（CST）software,the polarization characteristics of twodimensional metal grating arrays in 0.1-10 THz region are numerically analyzed.Different periodic metal copper grating arrays with 20 nm thickness deposited on 500μm thick high-resistance silicon substrate are experimentally prepared by photo-lithography and thin-film technology.Then,the transmission and reflection characteristics of the structure are measured by Fourier transform spectrometer.Results show that the grating arrays have good polarization characteristics of the transmission and reflection in terahertz broad-band,and the polarization range can be adjusted by the structural period.Our results provide a reference for the further study and application of THz polarizer.

关 键 词：集成光学 偏振特性 透射及反射特性 金属光栅阵列 太赫兹 宽谱 

分 类 号：O436[机械工程—光学工程]