Research on photodiode integrated with wide spectrum focusing reflector using nonperiodic subwavelength gratings  

作　　者：Tao Liu Yongqing Huang Jiarui Fei Gang Wu Xiaokai Ma Xiaofeng Duan Kai Liu Xiaomin Ren 刘涛;黄永清;费嘉瑞;武刚;马晓凯;段晓峰;刘凯;任晓敏(Institute of Information Photonics and Optical Communications,Beijing University of Posts and Telecommunications)

机构地区：Institute of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China

出　　处：《Chinese Optics Letters》2018年第5期52-55,共4页中国光学快报（英文版）

基　　金：funded by the National Natural Science Foundation of China(NSFC)(Nos.61574019,61674020,and 61274044);the 111 Project(No.B07005);the Beijing Municipality Natural Science Foundation(No.4132069);the Program for Changjiang Scholars;Innovative Research Team in University through the Ministry of Education of China(No.IRT0609)

摘　　要：The fabrication and characterization of p-i-n photodiodes integrated with wide spectrum focusing reflectors using nonperiodic strip and concentric-circular subwavelength gratings are presented. The experimental results show that the gratings can reflect and focus the incident light on the absorber of the photodiode, and thus can simultaneously achieve high speed and high efficiency. For the gratings’ integrated photodiodes, the responsivity is improved over a wide spectral range, and when the absorber was 600 nm and the mesa diameter was40 μm, a responsivity of 0.46 A/W at a wavelength of 1.55 μm and a 3 dB bandwidth of 21.6 GHz under a reverse bias of 3 V were simultaneously obtained.The fabrication and characterization of p-i-n photodiodes integrated with wide spectrum focusing reflectors using nonperiodic strip and concentric-circular subwavelength gratings are presented. The experimental results show that the gratings can reflect and focus the incident light on the absorber of the photodiode, and thus can simultaneously achieve high speed and high efficiency. For the gratings’ integrated photodiodes, the responsivity is improved over a wide spectral range, and when the absorber was 600 nm and the mesa diameter was40 μm, a responsivity of 0.46 A/W at a wavelength of 1.55 μm and a 3 dB bandwidth of 21.6 GHz under a reverse bias of 3 V were simultaneously obtained.

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分 类 号：TN312.4[电子电信—物理电子学]