线偏振光和圆偏振光下ZrO_2和Al_2O_3陶瓷材料的飞秒激光烧蚀性能  

Femtosecond Laser Ablation Properties of ZrO_2 and Al_2O_3 Ceramics at Linear and Circular Polarized Light

作　　者：张军战[1] 张媛敏 刘永胜 张颖[1] 刘乾 ZHANG Jun-zhan;ZHANG Yuan-min;LIU Yong-sheng;ZHANG Ying;LIU Qian(Functional Material Laboratory, College of Materials ＆Mineral Resources, Xi＇an University of Architecture and Technology, Xi＇an 710055, China;State Key Laboratory of Solidification Processing, Northwestern Polytechnical Xi＇an 710072, China;Xi＇an MicroMach Technology Co., Ltd, Xi＇an 710199, China)

机构地区：[1]西安建筑科技大学材料与矿资学院功能材料研究所,西安710055 [2]西北工业大学凝固技术国家重点实验室,西安710072 [3]西安中科微精光子制造科技有限公司,西安710199

出　　处：《光子学报》2018年第6期143-151,共9页Acta Photonica Sinica

基　　金：西北工业大学凝固技术国家重点实验室开放课题(No.SKLSP201640)资助~~

摘　　要：将不同脉冲数的飞秒激光作用于陶瓷材料表面,研究了线偏振和圆偏振激光对氧化锆和氧化铝陶瓷材料烧蚀阈值的影响,利用光学显微镜和扫描电子显微镜分析了烧蚀坑表面形貌,利用激光扫描共聚焦显微镜确定了烧蚀坑深度.结果表明:两种材料在线偏振光下的饱和烧蚀阈值均小于在圆偏振光下的值;当偏振态相同时,氧化锆饱和烧蚀阈值小于氧化铝.随脉冲数增加,线偏振和圆偏振光下氧化锆烧蚀坑表面结构均由无序向有序发展,出现了周期性环形波纹结构和纳米孔洞阵列.与线偏振光相比,圆偏振光对烧蚀坑深度的作用更明显,且烧蚀坑表面形貌对能量密度变化比较敏感,更容易产生周期性结构.The effects of linearly polarized and circularly polarized femtosecond laser on the ablation threshold of ZrO2 and Al2 O3 ceramics at different pulse numbers were investigated. The surface morphology of the ablated craters was analyzed by optical microscopy and scanning electron microscopy and the depth of the ablated craters was measured by laser scanning confocal microscopy. The results show that the saturation ablation threshold of the two materials at linearly polarized light is smaller than that of circularly polarized light. The saturation ablation threshold of ZrO2 is smaller than that of Al2 O3 at the same polarization state. With the increase of pulse numbers,the surface structures of ZrO2 ablation craters develop from disorder to order,and periodic layer annular ripple structures and nanohole arrays are observed at linear and circular polarized light. Compared with linearly polarized light,the effect of circularly polarized light on the depth of ablated craters is stronger,and surface morphology is more sensitive to the change of laser fluence,at the same time,the periodic structures are more obvious.

关 键 词：飞秒激光 偏振态 点烧蚀 多脉冲 氧化锆陶瓷 氧化铝陶瓷 

分 类 号：TN249[电子电信—物理电子学]