载流子浓度与迁移率对氧化物薄膜红外透明导电性能影响的研究进展  

The research progress about the effect of carrier concentration and mobility on the infrared transparent properties and conductive properties of oxide thin films

作　　者：郭帅[1] 杨磊 代兵[1] 耿方娟 杨振怀[1] 王鹏[1] 雷沛 RALCHENKO V 韩杰才[1] 朱嘉琦[1,4] GUO Shuai;YANG Lei;DAI Bing;GENG FangJuan;YANG ZhenHuai;WANG Pengl;LEI Pei;RALCHENKO V;HAN JieCai(National Key Laboratory of Special Environment of Composite Technology, Harbin Institute of Technology, Harbin 150001, China;Key Laboratory of Micro-systems and Micro-structures Manufacturing for Ministry of Education, Harbin Institute of Technology, Harbin 150001 China;Center of Analysis Measurement, Harbin Institute of Technology, Harbin 150001, China;Beo＇ing Institute of Aeronautical Materials, Beijing 100095, China)

机构地区：[1]哈尔滨工业大学特种环境复合材料技术国家级重点实验室,哈尔滨150001 [2]哈尔滨工业大学分析测试中心,哈尔滨150001 [3]北京航空材料研究院,北京100095 [4]哈尔滨工业大学微系统与微结构制造教育部重点实验室,哈尔滨150001

出　　处：《中国科学：技术科学》2018年第6期583-595,共13页Scientia Sinica(Technologica)

基　　金：国家杰出青年科学基金(批准号：51625201)、国家自然科学基金(批准号：51372053)、国家自然科学基金创新研究群体项目(批准号：11421091)和中国国际合作项目(批准号：2015DFR50300)资助

摘　　要：红外透明导电薄膜凭借其在可见光-红外光范围内高透过和高导电的优点引起了广泛关注.根据德鲁德自由电子理论可知,透明导电薄膜的光学性能和电学性能之间难以协调.为了探明透明导电薄膜能否同时具有中-远红外光学透过性能和高导电性能,首先从电子与光子相互作用的机制出发,分析红外波段光电性能难以协调的本质原因,并提出实现红外透明导电的可能性.其次对近几年氧化物薄膜光电性能研究成果进行综述,探讨其光学性能和电学性能之间的作用关系,揭示了载流子浓度和迁移率与等离子波长和导电性能的关系,得出透明导电薄膜可以同时实现红外宽波段透过性能和高导电性能.最后得出可以通过调节薄膜的载流子浓度和迁移率,实现同时具有红外光学性能和电学性能的薄膜.Due to the high visible transmittance and conductivity, transparent conductive films caused more and more attention. However, according to the Drude＇s theory, there still exist some doubts about the possibility of infrared transparent conductive film. It is the fact that, due to the electrical and optical properties determined by carrier concentration, the contradiction between the wide-range infrared transmission and high conductivity is difficult to coordinate. In this paper, firstly, according to interaction between electrons and photons, we explored the key of confliction between electrical and optical properties, and also discovered the feasibility of infrared transparent conductive films. Through theoretical analysis, we found the reasons of contradiction of electrical and optical properties. Secondly, by summarizing and analyzing the photoelectrical properties of the conventional transparent conductive oxide films, we put forward the relationship among free-electrical, mobility, plasma wavelength and conductivity properties. Lastly, as the result of our research, if the film has the wide-range infrared transmission and high conductivity properties at same time, the effect of carrier concentration and mobility on plasma wavelength is not overlooked.

关 键 词：红外透明导电薄膜 载流子 迁移率 等离子波长 

分 类 号：TB383.2[一般工业技术—材料科学与工程]