X射线荧光光谱仪真空控制系统设计与实现  

The Design and Realization for Vacuum Control System of X-ray Fluorescence Spectrometer

作　　者：杨佳铭 麻硕[1] 邱忠义[1] Yang Jiaming, Ma Shuo, Qiu Zhongyi(Beijing AriTime Intelligent Control CO., LTD, Beijing 100070, Chin)

机构地区：[1]北京金自天正智能控制股份有限公司,北京100070

出　　处：《现代科学仪器》2018年第1期65-67,119,共4页Modern Scientific Instruments

基　　金：国家重大科学仪器设备开发专项项目：2012YQ050076

摘　　要：基于X射线荧光光谱仪对测量环境真空度的需求，提出了一种带自动压力控制的真空控制系统。所设计的真空控制系统由智能传感器、控制芯片、上位机、执行机构和辅助电路组成，并设置两种工作模式。实验结果表明，控制系统在两种工作模式下运行正常，具有压力实时监控、系统故障检测等功能，并可以根据压力值改变真空泵的转速，从而达到节约能源的效果。This paper proposes a vacuum control system with auto pressure control based on the requirement of X-ray fluorescence spectrometer. The system is composed of smart sensor, control chip, host computer, actuator and other auxiliary circuits. It can set up two type operation modes. The experiment results show that the control system operates properly in two modes and has the functions of monitoring the vacuum environment in real-time and failure detection. This system can also change the rotation speed of vacuum pump according to the pressure to achieve the effect of saving energy.

关 键 词：X射线荧光光谱仪 真空控制系统 自动压力控制 

分 类 号：TH842[机械工程—仪器科学与技术]