An Optical MIM Pressure Sensor Based on a Double Square Ring Resonator  

作　　者：Pardis PALIZVAN Saeed OLYAEE Mahmood SEIFOURI 

机构地区：[1]Nano-photonics and Optoelectronics Research Laboratory (NORLab), Shahid Rajaee Teacher Training University Lavizan 16788-15811, Tehran, Iran [2]Faculty of Electrical Engineering, Shahid Rajaee Teacher Training University, Lavizan 16788-15811, Tehran, Iran

出　　处：《Photonic Sensors》2018年第3期242-247,共6页光子传感器（英文版）

摘　　要：In this paper, we have proposed a metal-insulator-metal （MIM） pressure sensor which consists of two plasmonic waveguides and a double square ring resonator. The two square rings are connected via a rectangular patch located between the two of them. The surface plasmon polaritons （SPPs） can be transferred from a square ring to the other through this patch. The finite-difference time-domain method （FDTD） has been used to simulate the device. Applying a pressure on the structure, it deforms, and a red shift of 103 nm in the resonance wavelength has been calculated. The deformation is linearly proportional to the wavelength shift in a wide range of wavelength. The proposed optical plasmonic pressure sensor has a sensitivity of 16.5nm/MPa which makes it very suitable for using in biological and biomedical engineering.In this paper, we have proposed a metal-insulator-metal （MIM） pressure sensor which consists of two plasmonic waveguides and a double square ring resonator. The two square rings are connected via a rectangular patch located between the two of them. The surface plasmon polaritons （SPPs） can be transferred from a square ring to the other through this patch. The finite-difference time-domain method （FDTD） has been used to simulate the device. Applying a pressure on the structure, it deforms, and a red shift of 103 nm in the resonance wavelength has been calculated. The deformation is linearly proportional to the wavelength shift in a wide range of wavelength. The proposed optical plasmonic pressure sensor has a sensitivity of 16.5nm/MPa which makes it very suitable for using in biological and biomedical engineering.

关 键 词：Pressure sensor plasmonic resonator square ring resonator MIM structure surface plasmon polaritons 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TB535[自动化与计算机技术—控制科学与工程]