气体火花开关电极的溅射特性  

Electrode Sputtering Characteristic in Gas Spark Gap

作　　者：钟伟[1] 刘云龙[1] 徐翱[1] 尚绍环[1] 金大志[1] ZHONG Wei;LIU Yunlong;XU Ao;SHANG Shaohuan;JIN Dazhi(Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 62 1999, China)

机构地区：[1]中国工程物理研究院电子工程研究所

出　　处：《高电压技术》2018年第6期1996-2004,共9页High Voltage Engineering

基　　金：中国工程物理研究院科技发展基金(2015B0402085);中国工程物理研究院电子工程研究所创新基金(S20150803)~~

摘　　要：电极烧蚀和颗粒溅射是影响气体火花开关绝缘性能和工作可靠性的主要因素之一,为进一步研究其电极烧蚀及颗粒溅射特性。利用充气式真空动态平台开展不同材料（Mo、WCu）电极间的大电流放电实验并利用扫描电镜进行分析。结果表明：无论作为阳极还是阴极,WCu在前500次放电过程中都比Mo更早出现烧蚀痕迹,甚至首次放电即产生4μm溅射颗粒;50次放电后,阴阳极间开始出现相互颗粒溅射,且分布范围随放电次数增加逐步扩大到距阴极孔边缘1 mm左右的区域。这表明采用电极烧蚀率作为衡量材料的耐烧蚀性能的单一指标是存在缺陷的,其无法排除电极间溅射颗粒质量的影响,而溅射颗粒由于其分布广、易脱落等特点成为影响开关绝缘性能的关键因素。Electrode erosion and particulate sputtering would be inevitable in gas spark gap, which could affect its dielectric performance and reliability. To analyze the process of electrode-to-electrode sputtering in gas spark gap,we conducted discharge experiments between Mo and WCu electrodes in the inflatable vacuum dynamic system and analyzed the results with SEM. Results indicated that WCu, no matter as anode or cathode, turned out to be more easily and early eroded than Mo in their first 500 shots and even sputtered 4 μm particles after only one shot. Anode and cathode began sputtering particles to each other after 50 shots, and its distribution range extended to the region 1 mm apart from cathode hole. Consequently, it was imperfect that electrode erosion rate acted as single index to estimate the anti-erosion performance of electrode, which hardly eliminated sputtering particles＇ effects. Sputtering particles, scattered widely and shed easily, could be the key factor to influence dielectric performance of the gap.

关 键 词：气体火花开关 绝缘性能 电极烧蚀 颗粒溅射 脉冲功率 扫描电子显微镜 

分 类 号：TM564[电气工程—电器]