多芯光纤端面耦合微纳波导有机气体传感器  

Multicore optical fiber coupled micro-and nano-waveguide for sensing of volatile organic compounds

作　　者：张思瑶 齐彦文 冯胜飞[1] 王新柯[1] 孙文峰[1] 叶佳声[1] 韩鹏[1] 张岩[1] ZHANG Siyao, QI Yanwen, FENG Shengfei, WANG Xinke, SUN Wenfeng, YE Jiasheng, HAN Peng, ZHANG Yan(Department of Physics, Capital Normal University, Beijing 100048, China)

机构地区：[1]首都师范大学物理系,北京100048

出　　处：《中国科技论文》2018年第5期522-527,共6页China Sciencepaper

基　　金：高等学校博士学科点专项科研基金资助项目(20121108120009)

摘　　要：以多芯光纤端面为平台,在其上设计并采用双光子三维激光直写技术制备了由微柱、微棱镜、微椎体及微纳波导组成的光刻胶光路系统。实验研究了不同截面尺寸微纳波导对乙醇蒸气的光学传感响应特性。在波导截面尺寸优化后,获得标准大气压下,22℃的饱和乙醇蒸气的时间响应为1.54nm/s,最低的乙醇蒸气探测浓度为27.3g/m3,最高乙醇浓度变化响应的灵敏度为3.7×10-13 m/(g·m-3)。该器件具备小型化、远程化及操作简便等优点,有望应用于空间狭小、被检测物难以接触的环境。Taking the end facet of a multicore optical fiber as a platform,an optical system is designed and fabricated by using three dimensional two-photon lithography technology,which is consists of micro-pillars,prisms,tapers,micro-and nanowaveguide,and connects two cores of the multicore optical fiber.The response properties of this system to the vapor of ethanol are investigated experimentally.With the optimized geometrical parameters of the micro-and nano-waveguide,the time response to the vapor of ethanol is 1.54 nm/s,the lowest detectable concentration is 27.3 g/m3,and the response sensitivity of the system to the change of the vapor concentration is 3.7×10-13 m/（g·m-3）,under standard atmospheric pressure and room temperature of 22 ℃.This device with advantages of miniaturization,remote sensing and easy-to-use,could be applied in the situation with limited space.

关 键 词：光学工程 光纤传感 模间干涉 纳米光学 双光子光刻 

分 类 号：TH741[机械工程—光学工程]