自确认金属氧化物半导体气体传感器阵列及其应用研究  

Research on Self-Validating MOS Gas Sensor Array and Its Application

作　　者：陈寅生 宋凯[2] 王祁[2] 路佳浩 CHEN Yinsheng;SONG Kai;WANG Qi;LU Jiahao(Harbin University of Science and Technology,School of Measurement and Control Technology and Communication Engineering,Harbin 150001,China;Harbin Institute of Technology,School of Electrical Engineering and Automation,Harbin 150001,China)

机构地区：[1]哈尔滨理工大学测控技术与通信工程学院,哈尔滨150001 [2]哈尔滨工业大学电气学院,哈尔滨150001

出　　处：《传感技术学报》2018年第5期677-682,共6页Chinese Journal of Sensors and Actuators

基　　金：黑龙江省普通本科高等学校青年创新人才培养计划项目(UNPYSCT-2015043);黑龙江省自然科学基金项目(QC2016067)

摘　　要：金属氧化物半导体(MOS)气体传感器阵列是机器嗅觉系统中获取目标气体信息的重要装置。由于气敏元件的材料特性,MOS气体传感器阵列在工作过程中不可避免地会发生突发故障及外界干扰,导致机器嗅觉系统的检测与分析性能下降。为了提升机器嗅觉系统的可靠性,在总结以往研究成果的基础上,提出了自确认MOS气体传感器阵列。该气体传感器阵列结合自确认传感器技术,能够实现自身的多故障检测与隔离、故障识别、故障恢复及测量质量评估等自确认功能。本文分别探讨了自确认MOS传感器阵列的硬件架构、功能模型及其关键技术。最后,介绍了一种面向大气环境污染气体监测的自确认MOS传感器阵列,实现了其异常状态监测与测量质量评估并对其有效性进行了验证。Metal-oxide semiconductor（ MOS） gas sensor array is an important device for acquiring target gas information in the machine olfactory system. Due to the material properties of the gas component,MOS gas sensor array in the process of working inevitably occurs sudden failure and external disturbance,which will result in detection and analysis performance of machine olfactory system degradation. In order to improve the reliability of machine olfactory system,this paper innovatively presents a self-validating MOS gas sensor array based on the results of the author＇s previous researches. The gas sensor array combining with self-validating sensor technology can realize self-validating functions such as multi-fault detection and isolation,fault identification,fault recovery and measurement quality evaluation and so on by itself. This paper discusses the hardware architecture,functional models and key technologies of self-validating sensor array. Finally,this paper introduces a self-validating gas sensor array that realizes abnormal condition monitoring and measurement quality evaluation for atmospheric environmental pollution monitoring and verifies its effectiveness.

关 键 词：自确认传感器技术 传感器阵列 故障检测与隔离 故障识别 测量质量评估 

分 类 号：TP214[自动化与计算机技术—检测技术与自动化装置] TP18[自动化与计算机技术—控制科学与工程]