基于微机电系统技术的光纤加速度传感器  

Fiber-Optic Acceleration Sensors Based on Micro-Electromechanical Systems Technology

作　　者：张颖[1] 吴俊[1] 魏江南[2] 金祖武 姚江淮 Zhang Ying;Wu Jun;Wei Jiangnan;Jin Zuwu;Yao Jianghuai(College of Electrical Engineering, Yanshan University, Qinhuangdao, Hebei 066004, China;College of Science, Hebei University of Science and Technology, Shijiazhuang, Hebei 050018, China)

机构地区：[1]燕山大学电气工程学院,河北秦皇岛066004 [2]河北科技大学理学院,河北石家庄050018

出　　处：《光学学报》2018年第6期57-63,共7页Acta Optica Sinica

基　　金：国家自然科学基金(61471312);河北省自然科学基金(F2015203240)

摘　　要：设计了一种基于光强调制原理和微机电系统(MEMS)技术的光纤加速度传感器。加速度传感单元为硅质矩形梁,给出了矩形梁弯曲导致的遮光板位移与接收光纤光功率差的关系以及硅质矩形梁中间位置挠度与系统加速度的关系,得到了加速度与光功率差的关系。研究结果表明,设计的光纤加速度传感器在矩形梁中间位置的挠度变化范围为0~10μm时,相应的加速度测量范围为0~120m·s-2,最大加速度检测值高达12g(g为重力加速度)。Based on the principle of light intensity modulation and micro-electromechanical system（MEMS）technology,we design a kind of optical fiber acceleration sensor.Two silicon rectangular beams are used as the acceleration sensing elements.According to the relation between the shade displacement and the light power difference of the receiving optical fiber,as well as the relation between the deflection of the silicon rectangular beam at center position and the system acceleration,an expression of acceleration with the light power difference is given.The research result shows that,while the deflection of the silicon rectangular beam at center position is 010 μm,the corresponding acceleration value is 0120 m·s-2,and the maximum acceleration detective value can be as much as 12 g（gis the acceleration of gravity）.

关 键 词：光纤光学 加速度传感器 光强调制 光功率差 

分 类 号：TH744[机械工程—光学工程]