HIRFL-800低温泵快速再生系统研究  

Novel Rapid Regeneration Device for Lab-Built Cryopump

作　　者：李长春 朱小荣 蒙峻[1] 罗成[1] 贾豫生[1] 蔺晓建 刘建龙 Li Changchun;Zhun Xiaorong;Meng Jun;Luo Cheng;Jia Yusheng;Lin Xiaojian;Liu Jianlong(Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, China;University of Chinese Academy of Sciences ,Beijing 100049, China)

机构地区：[1]中国科学院近代物理研究所,兰州730000 [2]中国科学院大学,北京100049

出　　处：《真空科学与技术学报》2018年第6期450-454,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：针对HIRFL-800低温泵自然再生时间较长的特点,运用电加热快速再生原理设计了一套快速再生系统,将低温泵再生时间由六七个小时缩短至四个多小时,以提高维护效率,为重要实验的进行节省时间。该系统采用在低温泵低温板和屏蔽罩上永久固定加热电阻加热的方案,通过对低温板和屏蔽罩的加热功率进行自动控制以使其平缓升温。通过对再生所需加热功率进行计算并运用ANSYS软件模拟低温泵低温板和屏蔽罩终态温度分布,反向验证了加热功率的可靠性。A novel rapid regeneration device for the lab-built cryopump,800 mm in diameter and installed in Heavy Ion Research Facility in Lanzhou（HIRFL）,was developed to significantly shorten the long spontaneous regeneration time. The original work included the resistive heaters fixed on the shielding case and cryo-panel and an automatic temperature control unit. The influence of the resistive heating power on the time evolution of the temperature distributions in the shielding case and cryo-panel was mathematically modeled,theoretically analyzed,numerically simulated in finite element method with ANSYS software and experimentally tested. The simulated results show that the final temperature distributions of the shielding case and cryopanel,automatically heated at 56. 8 and 36. 9 W,respectively,satisfied well the rapid regeneration requirements of the cryopump.

关 键 词：低温泵 快速再生 功率计算 数值模拟计算 温度自动控制系统 

分 类 号：TB752.53[一般工业技术—真空技术]