高电荷态电子回旋共振离子源难熔金属高温炉研制  

Design of high temperature oven for refractory metallic ion beam production in high charge state ECR ion source

作　　者：黄维[1,2] 钱程 孙良亭[2] 张雪珍[2] 曹云[2] 卢旺[2] 冯玉成[2] 郭俊伟[2] 方兴[2] 李锡霞[2] 赵红卫[1,2] HUANG Wei;QIAN Cheng;SUN Liangting;ZHANG Xuezhen;CAO Yun;LU Wang;FENG Yucheng;GUO Junwei;FANG Xing;LI Xixia;ZHAO Hongwei(University of Science and Technology of China,Hefei 230027, China;Institute of Modern Physics,Chinese Academy of Sciences, Lanzhou 730000, China)

机构地区：[1]中国科学技术大学,合肥230027 [2]中国科学院近代物理研究所,兰州730000

出　　处：《核技术》2018年第7期46-52,共7页Nuclear Techniques

基　　金：科技部"973"专项(No.2014CB845500);国家自然科学基金(No.11427904)资助~~

摘　　要：高电荷态电子回旋共振(Electron Cyclotron Resonance,ECR)离子源产生金属离子束的方法有炉子加热法、溅射法、MIVOC(Metallic Ion from Volatile Compounds)等,其中炉子加热法具有产生的束流强度高、稳定性好的特点。炉子加热法的技术核心是加热炉,按其工作温区主要分为低温炉、高温炉两大类。高温炉主要针对熔点1 500°C以上的金属钴、钛、钒、铂、铀等。通过ANSYS仿真模拟分析了高温炉钽坩埚的温度分布、高温下因膨胀所受热应力及其在ECR离子源工作环境的强磁场中所受的安培力作用。根据模拟分析结果研制了电阻式加热高温炉,并对其进行了离线测试,实验中钽坩埚在1 800°C以上发生的形变与ANSYS模拟结果相符,并根据模拟分析给出了改进方案。改进后的电阻式加热高温炉离线测试能在1 500°C稳定维持48 h以上,而在1 846°C时可稳定维持达6 h以上,结果表明:研制的电阻式加热高温炉可应用于ECR离子源产生强流高电荷态难熔金属离子束。[Background] The methods to produce metallic ions in high charge state electron cyclotron resonance（ECR） ion source are micro-oven method, sputtering method and metallic ion from volatile compounds（MIVOC） method and so on, amongst which the micro-oven method can help produce high intensity and high reliability ion beams. There are mainly two types of micro-oven in use, i.e. low temperature oven and high temperature oven. [Purpose] High temperature oven is especially used for metals with melting temperature over 1 500 °C, such as cobalt, titanium, vanadium, platinum, uranium, etc. [Methods] Using ANSYS, simulation and analysis of the temperature distribution on a tantalum crucible of high temperature oven, its thermal stress at high temperature and Ampere’s force under the strong ECR ion source magnetic field working condition have been performed. [Results] According to the test, the deformation of tantalum crucible over 1 800 ℃ after off-line test is consistent with the simulation in the ANSYS well, which puts forward an improved scheme. And the improved resistor heating micro-oven can remain stable at 1 500 ℃ for 48 h and 1 846 ℃ for 6 h in the off-line test. [Conclusion] The designed resistor heating micro-oven can be used in ECR ion source for the production of high intensity highly charged refractory metallic ion beams.

关 键 词：ECR离子源 电阻加热 高温炉 金属离子 

分 类 号：TL56[核科学技术—核技术及应用]