电压和激光模式对三维原子探针测试结果的影响  

Effects of Voltage and Laser Modes on Test Results of Three-Dimensional Atom Probe

作　　者：沈琴 王泽民[1,2] 李慧 刘文庆[1] SHEN Qin;WANG Zemin;LI Hui;LIU Wenqing(Institute of Materials,School of Materials Science and Engineering,Shanghai University,Shanghai 200444,China;School of Materials Science and Engineering,Shanghai Institute of Technology,Shanghai 201418,China)

机构地区：[1]上海大学材料科学与工程学院材料研究所,上海200444 [2]上海应用技术大学材料科学与工程学院,上海201418

出　　处：《理化检验（物理分册）》2018年第6期385-389,共5页Physical Testing and Chemical Analysis(Part A:Physical Testing)

基　　金：国家重点研发计划资助项目(No.2016YFB0700401);国家自然科学基金委员会-中国工程物理研究院NSAF联合基金资助项目(No.U1530115);上海市科学技术委员会重点项目(12JC1404000);上海市科委科学仪器化学试剂专项(17142203100)

摘　　要：将Fe-CuMnNiAl钢淬火后在450℃回火4h,分别在电压和激光模式下,用三维原子探针(3DAP)对其进行测试,对比研究了两种模式对测试结果的影响。结果表明:与电压模式相比,激光模式下的数据背底较小,质量分辨率较好,成分分析结果较准确,蒸发离子价态二价减少,一价增多,甚至出现两个原子同时蒸发的离子团;另外,激光模式下测得的析出相尺寸稍大,数量密度稍低,析出相核心铜元素含量较低。Fe-CuMnNiAl steel was quenched to room temperature and then tempered at 450 ℃for 4 h.The tempered steel specimens were tested by three-dimensional atom probe（3 DAP）under voltage mode and laser mode respectively to study the effects of different modes on the test results.The results show that the background of the data was smaller,the mass resolution was higher,the composition analysis results was more accurate under the laser mode compared with those under the voltage mode.Under the laser mode,the divalent evaporation ions were reduced,while the monovalent ions increased,and two atom group evaporated at the same time even more.It is found that the precipitate was bigger in size and was slightly lower in density under the laser mode than under the voltage mode,and the core Cu content of precipitate was lower under the laser mode.

关 键 词：电压模式 激光模式 三维原子探针(3DAP) 析出相 

分 类 号：TH87[机械工程—仪器科学与技术]