揭秘“精密机械之王”  

Uncover the King of Precision Machinery

作　　者：唐玉国[1] 巴音贺希格[1] 竺长安[2] 金一[2] Tang Yuguo;Bayanheshig;Zhu Changan;Jin Yi(Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130031;School of Engineering Science, University of Science and Technology of China, Hefei 230027)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130031 [2]中国科学技术大学工程科学学院,合肥230027

出　　处：《中国基础科学》2018年第2期48-52,62,共6页China Basic Science

基　　金：973计划(2014CB049500)

摘　　要：大型光学系统及高端科学仪器对我国科学研究、国防安全、经济建设和社会民生等各领域的进步和发展具有极其重要的作用。其发展的重要趋势是:视场不断增大,分辨力不断提高,相应地要求光学元器件扩大口径和提高精度。而光栅是一类以机械刻划方式制造的具有宏观尺度的纳米精度周期性特种功能结构,是大型光学系统和科学仪器的核心光学元件,需要纳米级的加工精度和表面粗糙度,这不仅要求打破传统的光学精密机械制造原理及系统控制策略,实现纳米级的长行程超精密定位技术,还需要研究制造原理和质量控制的评价标准。传统的光栅制造技术及制造装备已经无法满足上述要求,严重制约了我国在这一领域的战略发展。因此,本文简要介绍了大面积光栅制造相关国家973计划项目的主要研究内容,重点介绍了为获得纳米刻线精度的大面积光栅而研制的具有新原理、新技术的大面积高精度光栅机械刻划系统。Large optical systems and high level scientific instruments play an important role in the development of scientific research on, national defense security,economic construction and social livelihood in our country. Currently, the important trend in the development of the large-scale optical system and scientific instruments is that continuously increasing the field of view and improving the resolution. So it requires that optical components must expand diameter and improve accuracy. The grating manufactured by mechanical ruling has periodic special functional structure with macroscopic scale and nanometer precision.It is the core optical element of the large optical system and scientific instruments, which need nanoscale machining accuracy and surface roughness. It needs to not only break the traditional optical precision machinery manufacturing principle and system positioning technology to implement the nanoscale long stroke ultra-precision positioning technology,but also research the manufacturing principle and evaluation standard of quality control. Therefore,the traditional grating manufacture technology and equipment can not meet the above requirements and it severely restricted the development of this field in our country. Thus,this paper introduced briefly that main research concept in large area grating field of national basic theory research program 973. We focus on the large area high precision grating mechanical ruling system with the new generation principle and technology to have the large area grating.

关 键 词：大面积光栅 刻划光栅 光栅刻划机 超精密制造 

分 类 号：TH113.2[机械工程—机械设计及理论]