基于微悬臂梁传感器的微弱风力检测系统设计  

Design of weak wind force detecting system based on microcantilever sensor

作　　者：张飞 薛长国[1,2] 唐毓 张涛 胡业林[1] ZHANG Fei;XUE Chang-guo;TANG Yu;ZHANG Tao;HU Ye-lin(Institute of Coal Mine Electrical Automation,Anhui University of Science and Technology,Huai＇nan 232001,China;School of Materials Science and Engineering,Anhui University of Science and Technology,Huai＇ nan 232001,China)

机构地区：[1]安徽理工大学煤矿电气自动化研究所,安徽淮南232001 [2]安徽理工大学材料科学与工程学院,安徽淮南232001

出　　处：《传感器与微系统》2018年第7期73-74,77,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(11472006);安徽省杰出青年科学基金资助项目(1808085J30)

摘　　要：针对现有技术对微弱风力检测困难的问题,搭建基于微悬臂梁传感技术的微弱风力检测系统并实现微弱风力检测。传感器平台使用光纤耦合激光器作为光源,对微悬臂梁自由端进行照射。由微弱风力导致的微梁自由端的微小位移经过光杠杆原理放大,通过四象限探测器感光表面上的光斑相对位置实现对微弱风力的检测。利用编写的Lab VIEW程序进行数据采集控制,并实时显示微悬臂梁偏转位移曲线。实验结果表明:微悬臂梁的偏转位移和风力具有较好的线性关系,系统3倍噪声对应的风力约为1.5×10^(-4)N,风力检测结果的平均标准差为6.7×10^(-9)N,实验数据具有较高重复性。In order to solve the problem that the existing technology is difficult to detect weak wind force, a weak wind force detection system which is based on microcantilever sensor technology is built and weak wind force is detected by this system. A fiber-coupled laser is used as light source in this sensor platform and the free end of the microcantilever is radiated by the laser. The tiny displacement caused by the weak wind force at the free end of the microcantilever is amplified by the principle of the optical lever, and the relative position of the spot on the photosensitive surface of the four-quadrant detector is detection. The LabVIEW program is used to control the data acquisition and display the microcantilever deflection displacement curve in real time. The experimental results show that the deflection distance of the microcantilever and the wind force detected by the microcantilever have a good linear relationship. The wind force corresponding to the triple noise of the system is about 1.5×10^-4 N,and the average standard deviation of the wind force detection results is 6.7×10^-9 N. The experimental data has high repeatability.

关 键 词：微悬臂梁 风力 光杠杆 LABVIEW 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]