溶胶-凝胶法制备三元金属氮化物薄膜及其最新研究进展  

Recent Progress and Synthesis of Ternary Metal Nitride Thin Film by Sol-gel Method

作　　者：马勤 完彦少君 朱雪斌 火照燕 韩莉 MA Qin 1, WANYAN Shaojun 1,2 , ZHU Xuebin 2, HUO Zhaoyan 1, HAN Li 1(1 State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals, School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou 730050;2 Institute of Solid State Physics,Chinese Academy of Sciences, Hefei 23003)

机构地区：[1]兰州理工大学材料科学与工程学院省部共建有色金属先进加工与再利用国家重点实验室,兰州730050 [2]中国科学院固体物理研究所,合肥230031

出　　处：《材料导报》2018年第A01期113-117,共5页Materials Reports

摘　　要：三元金属氮化物薄膜是一类在电子、铁磁等领域具有广阔应用前景的新材料,主要有立方金属(反)钙钛矿和立方η碳化物(η-carbide)两种结构类型,由于其卓越的性能如高硬度、超导性、催化性以及各种不同的磁学性能而引起人们广泛的研究。本文主要介绍了三元氮化物结构特性以及溶胶-凝胶法(Sol-gel)在这些氮化物制备方面的应用,阐述并分析了溶胶-凝胶法的优缺点;简述了溶胶-凝胶法制备其他三元金属氮化物薄膜(如铁磁薄膜)的应用;最后指出了溶胶-凝胶法目前存在的一些问题。Ternary metal nitride films are a new class of materials with a wide range of applications in the fields of electronics,ferromagnetism,etc.There are mainly two types of structures,cubic metal（trans）perovskite and cubicη-carbide,due to their excellent properties such as high hardness,superconductivity,catalytic properties and various magnetic properties have led to extensive research.This article mainly describes the ternary nitride structure properties and the application of sol-gel method on the preparation of these nitrides.It also describes and analyzes the advantages and disadvantages of gol-gel method;and briefly describes the preparation of other ternary metal nitrides via sol-gel method on applications such as ferromagnetic thin films.Finally,the prospect of sol-gel methods and their current problems are pointed out.

关 键 词：溶胶-凝胶法 三元金属氮化物 薄膜 

分 类 号：G353.11[文化科学—情报学]