飞秒激光高效并行微孔加工技术研究  

Research on Efficient Parallel Femtosecond Laser Micro-drilling Technique

作　　者：张骆 翟中生[1] 吕清花[2] 陈波[1] 刘顿[1] ZHANG Luo 1 , ZHAI Zhongsheng 1 ,LV Qinghua 2 ,CHEN Bo 1 ,LIU Dun 1(1 School of Mechanical Engin., Hubei Univ. of Tech., Wuhan 430068,China;2 School of Science, Hubei Univ. of Tech., Wuhan 430068,Chin)

机构地区：[1]湖北工业大学机械工程学院,湖北武汉430068 [2]湖北工业大学理学院,湖北武汉430068

出　　处：《湖北工业大学学报》2018年第4期18-21,32,共5页Journal of Hubei University of Technology

基　　金：国家科技支撑计划资助项目(2015BAF20B03)

摘　　要：针对飞秒激光加工微孔过程中加工效率慢的问题,提出基于GSW算法的液晶空间光调制器的并行加工技术。利用液晶空间光调制器模拟光栅产生多光束的方法和迭代算法的原理,运用GSW算法计算10×10阵列和字符"H""B""U""T"微孔群的多光束全息图,将这些全息图加载到SLM中,利用CCD相机观察多光束效果,并在柔性电路板上进行加工实验。实验结果表明,本方法产生多光束数量可达100束,字符并行加工中光束均匀性超过0.73,加工微孔孔径尺寸偏差为1.34μm,多光束均匀性超过0.89。因此,此微孔加工技术是一种高效的并行加工方式。In order to solve the problem of slow processing efficiency in the process of femtosecond laser processing of micropores,aparallel processing technique based on GSW algorithm for liquid crystal spatial light modulator was proposed.The principle of using a liquid crystal spatial light modulator to simulate multi-beam generation by agrating and the iterative algorithm principle was used to compute a multi-beam hologram of a 10×10 array and microhole groups of＂H＂,＂B＂,＂U＂and＂T＂characters.These holograms were loaded into the SLM using a CCD camera to observe the effect of multiple beams and the processing experiment was performed on a flexible circuit board.The experimental results show that the method can produce up to 100 beams of multiple beams,the beam uniformity in character parallel processing exceeds0.73,the aperture size deviation of processed micro holes is 1.34μm,and the uniformity of multiple beams exceeds 0.89.Therefore,micro-hole machining technology is an efficient parallel processing method.

关 键 词：飞秒激光 多光束打孔 液晶空间光调制器 GSW算法 

分 类 号：TN249[电子电信—物理电子学]