高灵敏度扇面纤毛式MEMS矢量水听器  

Cross-Sector Ciliated MEMS Vector Hydrophone With High Sensitivity

作　　者：杨晟辉 丁俊文[1] 张国军[1] 裴毓 尚珍珍 YANG Chenghui;DING Junwen;ZHANG Guojun;PEI Yu;SHANG Zhenzhenv

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《压电与声光》2018年第4期599-603,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61127008);国家重点研发计划基金资助项目(2016YFC0101900);山西省应用基础究研基金资助项目(201601D011035);中国博士后科学基金资助项目(博士后编号176704)

摘　　要：目前微机电系统(MEMS)矢量水听器的研究出现瓶颈。大量实验表明,水听器的灵敏度与探测带宽存在着相互制约关系。为保证水听器具有20~500 Hz的针对远距离船舶辐射噪声的可探测带宽,急需提高MEMS矢量水听器在低频探测的灵敏度。该文在普通纤毛式MEMS矢量水听器的基础上,提出在柱形纤毛上集成十字扇面,通过增大声压接收面积,来提高低频探测的灵敏度。通过ANSYS Workbanch多参优化确定十字扇面的尺寸,通过ANSYS15.0对优化后的尺寸进行验证。利用微机械加工法集成扇面与柱形纤毛,利用水听器校准系统来测试扇面纤毛式矢量水听器的灵敏度,结果表明,灵敏度满足每频程6dB的增长趋势,在500 Hz时灵敏度达到-183.6dB(0dB=1V/μPa),比普通结构提高了近5dB。At present,there is a bottleneck in the research of MEMS vector hydrophone.A large number of experiments show that there is a mutual restriction between the sensitivity and the detection bandwidth of the hydrophone.To ensure that the hydrophone has the detectable bandwidth of 20~500 Hz for long distance ship radiated noise,it is urgent to improve the sensitivity of MEMS vector hydrophone in low frequency detection. On the basis of the ordinary cilium MEMS vector hydrophone, this paper proposes to integrate the cross sector on the cylindrical cilium to increase the sensitivity of the low frequency detection by increasing the acoustic pressure receiving area.The sizes of the cross sector are determined by the ANSYS Workbench multi parameter optimization, and the optimized sizes are verified by ANSYS15.0.The micromachined method is used to integrate the cross sector and the cylindrical cilium,and the sensitivity of the cross sector cilium vector hydrophone is tested by the hydrophone calibration system.The results show that the sensitivity meets the growth trend of 6 dB per frequency range, and the sensitivity at 500 Hz is up to -183.6 dB（0 dB= 1 V/μPa）, which is nearly 5 dB higher than that of the ordinary structure.

关 键 词：微机电系统(MEMS) 压阻传感器 ANSYS 高灵敏度 

分 类 号：TN55[电子电信] TB565.2[交通运输工程—水声工程]