基于相机式激光光束参数测量精度的影响因素分析  

Analysis of the Influence Factors on High Precision Measurement of Laser Beam Parameter Based on Camera

作　　者：肖青[1,2] 刘侠 邓剑钦 姚建铨 张大鹏[2] 王兴龙 Xiao Qin;Liu Xia;Deng Jianqin;Yao Jianquan;Zhang Dapen;Wang Xinglon(College of Precision Instrument and Optoelectronics Engineering,Tianjin University,Tianjin 300072,China;Advanced Fiber Resources（Zhuhai）Co.Ltd.,Zhuhai,Guangdong 519000,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]珠海光库科技股份有限公司,广东珠海519000

出　　处：《激光与光电子学进展》2018年第7期302-307,共6页Laser & Optoelectronics Progress

摘　　要：针对相机式光束质量分析仪测量光束的结果不一致问题,分析了相关参数对测量误差的影响。基于高斯光束模型,并添加与实际对应的噪声,根据ISO 11146标准计算了光斑直径。结合实验测试时的实际操作过程,提炼出光强饱和度、积分面积比、信噪比和光斑尺寸4个关键参数。不仅阐明了相机参数对测量误差影响的关键趋势,还分析了各个参数之间的关联影响,最终对如何选择相机的像元、像素、动态范围、暗噪声,以及如何设置积分时间、计算区域等提出了更明确的要求。To tackle the problem that the camera-based beam analyzer often gives the different results of the laser beam quality,we analyze the impact of the relevant parameters on the measurement error of the laser beam.The beam diameter is calculated by the ISO 11146 standard based on the Gaussian model with the noise level corresponding to the real one.According to the actual operation during testing,four parameters are analyzed,including the light intensity saturation,integral area ratio,signal to noise ratio and actual beam size.Compared with the prior works,we found the key trend of the camera parameters on the measurement error and the correlation between the parameters,which will be helpful to put forward more specific requirements on how to choose the camera and how to set the integration time and the calculation area.

关 键 词：激光光学 激光光束 光束参数 精度分析 相机 

分 类 号：TN247[电子电信—物理电子学]