大气压双频氦气放电特性的数值模拟研究  

Numerical Simulation of Dual-Frequency Helium Discharge at Atmospheric Pressure

作　　者：王一男[1,2] 李帅星 刘悦 金莹[1] 王莉[1] 张艳华[1] 石凤艳[1] Wang Yinan;Li Shuaixing;Liu Yue;Jin Ying;Zhang Yanhua;Wang Li;Shi Fengyan(College of Science,Liaoning Shihua university,FuShun 113001,China;Key Laboratory of Materials Modification by Laser,Ion and Electron Beams（Dalian University of Technology）,Ministry of Education,Dalian 116024,China)

机构地区：[1]辽宁石油化工大学理学院,抚顺113001 [2]三束材料改性教育部重点实验室(大连理工大学),大连116024

出　　处：《真空科学与技术学报》2018年第7期590-597,共8页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(批准号：11505089); 三束材料改性教育部重点实验室(大连理工大学)开放课题(批准号：LABKF1501); 辽宁省博士启动基金项目(批准号：20170520381); 辽宁省教育厅一般项目(批准号：L2016013)

摘　　要：采用1-D流体模型对大气压裸金属电极结构的双频驱动氦气放电特性进行了研究。模型中考虑了氦等离子体放电过程中的6种粒子和13个基本反应过程。研究了双频调制大气压氦气放电中高低频电压、高低频频率等不同匹配方式对等离子体参数的影响,并且通过对电子密度、电场强度、电流密度以及电子加热机制等分析了大气压氦气放电双频调控机制。研究表明:高频源电压及高频源频率对放电特性的影响要大于低频源电压和频率;电子密度、电子温度等随着高频源电压和频率的增加而增加,随着低频源电压的增加而减小,低频源频率将不影响电子密度及电子温度。本文的研究为大气压气体放电提供了更多的优化等离子体参数的手段。The characteristics of the bare metal electrodes,dual-frequency helium gas discharge at atmospheric pressure were mathematically formulated with 1-D fluid model,in which the reactions involving 6 particle types and13 elements were considered,theoretically analyzed and numerically simulated. The impact of the high/low frequency（ HF/LF） sources and matching modes on the plasma behavior were investigated. Besides,the electron heating mechanism was also discussed. The simulated results show that the HF source affects the plasma properties stronger than the LF source. To be specific,the e-density and e-temperature increase with the increases of the voltage and frequency of the HF source,but decreases with an increasing voltage of the LF source; and the LF source frequency little affects the e-density and e-temperature. We suggest that the simulated results may be of some technological interest in the helium plasma control.

关 键 词：双频调制 大气压气体放电 数值模拟 

分 类 号：O539[理学—等离子体物理]