微型声光调Q开关  

Micro Acousto-optic Q-switch

作　　者：傅礼鹏 令狐梅傲[1] 何晓亮[1] 王智林[1] 朱贺 陈华志 FU Lipeng;LINGHU Meiao;HE Xiaoliang;WANG Zhiling;ZHU He;CHEN Huazhi(The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,Chin)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2018年第3期319-322,共4页Piezoelectrics & Acoustooptics

摘　　要：该文介绍了应用于激光器系统中的微型声光调Q开关的设计、测试及应用。通过有限元数值分析各因素对声光调Q开关衍射损耗的影响,提出了一种新型优化声光调Q开关的设计方案。选用氧化碲(TeO_2)晶体作为光电偏转材料,利用集成电路兼容工艺加工得到封装尺寸为17.8 mm×6.8 mm×17.8 mm,工作波长1 064nm,光脉冲上升时间28.99ns的微型声光调Q开关。该微型声光调Q开关具有优异的性能,其体积缩减到原来产品的40%;光孔径为?0.8mm;在全温范围(-45~70℃)内稳定工作,衍射损耗保持在35%(±2%)。This paper introduced the design,testing and applications of micro acousto-optic Q-switch in laser system. The influences of various factors on the diffraction loss of the acousto-optic Q-switch was analyzed by the finite element method and a new design scheme for optimizing the acoustic-optical Q-switched was proposed. The tellurium oxide （TeO 2） crystal was selected as the photoelectric deflection material, and the micro acousto-optic Q-switch with a package size of 17.8 mm×6.8 mm×17.8 mm, operating wavelength of 1 064 nm and the light pulse rise time of 28.99 ns was fabricated by using the integrated circuit compatible process. The micro acousto-optic Q-switch has excellent performance, in which the volume has reduced to 40% of the original product and the diameter of the aperture was 0.8 mm. With stable operation over the full temperature range （-45~70 °C）, the diffraction loss was maintained at 35% （±2%）.

关 键 词：微型声光调Q开关 光脉冲上升时间 光孔径 衍射损耗 

分 类 号：TN24[电子电信—物理电子学]