霍耳位移法测量压电陶瓷的压电系数  

Measurement of Transverse Piezoelectric Coefficient by Hall Displacement Sensor

作　　者：解晓雯 严琪琪[1] 单声宇 XIE Xiaowen;YAN Qiqi;SHAN Shengyu(School of Physics and Nuclear Energy Engineering,Beihang University,Beijing 100083,China)

机构地区：[1]北京航空航天大学物理科学与核能工程学院,北京100083

出　　处：《压电与声光》2018年第3期362-365,共4页Piezoelectrics & Acoustooptics

基　　金：拓扑体系量子态调控及输运特性(KG12004001)

摘　　要：提出了一种利用霍耳位移传感器测量压电陶瓷的横向压电系数的新方法。该方法利用压电陶瓷的逆压电效应,对压电陶瓷施加一定大小的电压,使其在垂直电场方向上产生微小形变,利用霍耳位移传感器法测量这一微小位移,得到不同电压驱动下压电陶瓷相应的伸长量,通过计算得出该材料的压电系数。实验表明,该方法简单可靠,精确度高,实验结果符合预期。A new method of measuring the transverse piezoelectric coefficient of piezoelectric ceramics by utilizing Hall displacement sensor is proposed in this paper. Based on the converse piezoelectric effect, a certain voltage is applied to the piezoelectric ceramic so as to generate a tiny deformation in the direction of the vertical electric field. This micro-displacement is measured by the Hall displacement sensor, and according to the corresponding elongation of the piezoelectric ceramic under different voltages, the piezoelectric coefficient of piezoelectric ceramic can be obtained by calculation.The experimental results show that the method is simple, reliable and accurate, and the experimental results are in line with the expectation.

关 键 词：霍耳效应 霍耳位移传感器 压电系数 逆压电效应 微小位移测量 

分 类 号：TM282[一般工业技术—材料科学与工程]