角振动测量方法的研究  

A study of an angle vibration measuring method

作　　者：刘爱东[1] 于梅[1] 何闻[2] LIU Aidong;YU Mei;HE Wen(National Institute of Metrology,Beijing 100029,China;Key Laboratory of Advanced Manufacturing Technology of Zhejiang Province,School of Mechanical Engineering,Zhejiang University,Hangzhou 310027,China)

机构地区：[1]中国计量科学研究院,北京100029 [2]浙江大学机械工程学院浙江省先进制造技术重点实验室,杭州310027

出　　处：《振动与冲击》2018年第12期216-219,共4页Journal of Vibration and Shock

摘　　要：中国计量科学研究院研制出频率范围0.000 5 Hz^1 200 Hz高精度角振动基准装置,低频角振动装置最大角位移300°,中频角振动装置最大角位移60°,角加速度范围为0.04 rad/s^2~2 000 rad/s^2。装置实现了衍射式外差激光干涉仪测量方法,以及圆光栅和双光束外差激光干涉仪差动测量。角加速度复灵敏度测量不确定度(k=2):参考点优于0.5%,0.5°,通频带优于1.0%,1.0°。Primary standard of angular vibration devices have been developed in the National institute of Metrology.The maximum angular displacement of low angular vibration device is 300° and medium angular vibration device is 60°.The dynamic range of angular accelerate is 0. 04 rad/s^2 to 2 000 rad/s^2. Diffraction grating and heterodyne laser interferometer acted as the main measurement method. At the same time,circular grating and two-beam heterodyne laser interferometer differential measurement have been realized. Uncertainty of measurement of angular accelerate sensitivity（ k = 2） is： 0. 5%,0. 5°（ reference）,and others are better than 1. 0%,1. 0° in whole frequency band.

关 键 词：角振动 角加速度 角速度 角位移 外差激光干涉仪 衍射光栅 正弦逼近法 

分 类 号：TH825[机械工程—仪器科学与技术]