具有低带外响应的640×8元可见盲AIGaN紫外焦平面  

Visible blind AIGaN 640×8 pixel ultraviolet focal plane arrays with low out- of- band response

作　　者：马丁[1,2,3] 许金通 刘福浩[1,2] 张燕[1,2] 李向阳[1,2] Ma Ding;Xu Jintong;Liu Fuhao;Zhang Yan;Li Xiangyang(State Key Laboratories of Transducer Technology,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;Key Laboratory of Infrared Imaging Materials and Detectors,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China;University of Chinese Academy of Sciences,Beijing,100049,China)

机构地区：[1]中国科学院上海技术物理研究所传感技术国家重点实验室,上海200083 [2]中国科学院上海技术物理研究所红外成像材料与器件重点实验室,上海200083 [3]中国科学院大学,北京100049

出　　处：《红外与激光工程》2018年第A01期99-104,共6页Infrared and Laser Engineering

基　　金：国家自然科学基金（61106097,61204134,11304335）;上海市自然科学基金（16ZR1441300）

摘　　要：带外响应是紫外焦平面探测器的一个重要参数。作为一种宽禁带半导体材料，AIGaN基紫外探测器在紫外探测领域中具有十分优秀的带外响应性能及带外抑制能力。报道了一种640×8元可见盲紫外焦平面探测器，其光谱响应范围为345～363．5nm。为了表征该焦平面探测器在宽光谱范围内的带外响应性能，使用单色仪对该器件进行了光谱扫描，扫描光谱范围涵盖了从紫外波段到近红外波段的光谱范围。其结果表示，该紫外焦平面探测器具有优秀的带外响应性能，在300～1160nm光谱范围内，光谱带外响应比率仅为1．14％。Out-of-band response is a very important parameter of UVFPA detectors. As a wide-gap semiconductor material, AIGaN based ultraviolet detector exhibits excellent performance of the out-of- band response and rejection in ultraviolet detection. Visible blind AIGaN 640x8 pixel ultraviolet focal plane arrays （UVFPA） detector was reported, whose spectral response range is 345-363.5 nm. To characterize the out-of-band response of the detector over a wide spectral range, by monochromatic spectral scanning, a response spectrum of the UVFPA was obtained with a wide range from UV to near IR. The result shows that the UVFPA detector has an excellent performance of out-of-band response. The ratio is 1.14% over the whole spectral band from 300 to 1 160 nm.

关 键 词：带外响应 紫外焦平面探测器 可见盲 

分 类 号：TN23[电子电信—物理电子学]