一种压阻式压力传感器的温度补偿方法  

Temperature Compensation Method for Piezo-resistive Pressure Sensor

作　　者：李冀 胡国清[2,3] 周永宏 邹崇 吴翩卉 LI Ji1,2,HU Guo-qing2,3,ZHOU Yong-hong4,ZOU Chong4,WU Pian-hui3(1.Nanchang Hangkong University,Nanchang 330063,China;2.Department of Mechanical and Electrical Engineering,Xiamen University,Xiamen 361005,China;3.School of Mechanical and Automotive Engineering,South China University of Technology,Guangzhou 510641,China;4.Fujian Wide Plus Precision Instruments Co.Ltd,Fuzhou 350015,Chin)

机构地区：[1]南昌航空大学,江西南昌330063 [2]厦门大学机电工程系,福建厦门361005 [3]华南理工大学机械与汽车工程学院,广东广州510640 [4]福建上润精密仪器有限公司,福建福州350015

出　　处：《仪表技术与传感器》2018年第6期1-4,10,共5页Instrument Technique and Sensor

基　　金：国家科技重大专项项目(2015ZX03003010)

摘　　要：针对压阻式压力传感器的温度补偿问题,提出一种将样条插值与最小二乘拟合相结合的补偿算法,并结合传感器标定实验数据进行仿真试验。结果表明该方法相比曲面拟合方法、BP神经网络和RBF神经网络,补偿最大相对误差和平均补偿时间分别为0.103%和0.135 4 s,不仅能够满足高精度测试要求,而且可减少标定工作量达到提升生产效率的目的。To address this temperature compensation problem of Piezo-resistive pressure sensor,a combined method of spline interpolation and least square fitting was presented.The simulation results based on a calibration experiment demonstrate the maximum relative error of the proposed compensation method is 0.103% as well as the mean compensation time is about 0.135 4 s.Compared with the results come from surface fitting,BP neural networks and RBF neural networks,in addition to short the calibration process the proposed compensation method can also obtain a more satisfactory compensation precision. The compensation results also indicate that the presented temperature compensation method is able to reach a balance between the time cost and the compensation effectiveness,which lays a foundation to the further reach.

关 键 词：硅压阻式压力传感器 温度补偿 样条插值 最小二乘拟合 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]