寄生电容对电容式加速度传感器输出电压的影响  

Effect of Stray Capacitance on Capacitance Detecting System of Capacitive Microaccelerometer

作　　者：曲昊[1] 彭倍[1] 彭鹏[1] 周吴[1] 于慧君[1] QU Hao,PENG Bei,PENG Peng,ZHOU Wu,YUN Hui-jun(Department of Mechatronics Engineering,University of Electronic Science and Technology,Chengdu 611731,Chin)

机构地区：[1]电子科技大学机械电子工程学院,四川成都611731

出　　处：《仪表技术与传感器》2018年第6期15-18,63,共5页Instrument Technique and Sensor

摘　　要：电容检测是保证电容式加速度传感器正常工作的重要条件之一。传感器中敏感结构间的寄生电容会对电容检测产生影响。文中建立了传感器敏感结构的等效模型,分析了寄生电容对输出电压产生的影响。文中首先分析了电容式加速度传感器中检测电路的工作原理。其次,根据敏感结构的组成分析待测电容以及寄生电容的分布情况,以及寄生电容对电容检测结果的影响。最后,通过实验验证理论分析的结果。Capacitance detection is one of the essential procedures for the capacitive microaccelerometer to function well.The accuracy of the detection could be affected by the stray capacitance due to the shields of the microaccelerometer.In this paper,the effect of stray capacitances on the detection accuracy is analyzed through the sensing structure model of the microaccelerometer.Basic principle of the capacitance detection in the microaccelerometer and the distribution of sensing capacitances and stray capacitances are introduced in this paper.The effect of stray capacitances is analyzed and verified through experiments.

关 键 词：MEMS 梳齿式电容加速度传感器 电荷放大电路 寄生电容 

分 类 号：TH824[机械工程—仪器科学与技术]