共沉积Ag层对WO_3薄膜表面形貌和光吸收特性的影响研究  

Surface Morphology and Optical Absorption of WO_3 Thin Film:Effects of Co-deposited Ag Layers

作　　者：张宜林 金运 胡定康 张锋 ZHANG Yilin;JIN Yun;HU Dingkang;ZHANG Feng(School of Science,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学理学院,重庆400054

出　　处：《重庆理工大学学报（自然科学）》2018年第6期108-114,共7页Journal of Chongqing University of Technology：Natural Science

基　　金：国家自然科学基金青年基金资助项目(11104365);重庆市教委科技项目(KJ1500937)

摘　　要：利用磁控溅射WO_3陶瓷和金属Ag靶的方法在玻璃衬底上沉积WO_3及弥散Ag粒子的WO_3薄膜,通过SEM、XRD、Raman谱和UV-Vis光谱等技术考察共沉积Ag层在薄膜表层和里层分布对WO_3薄膜表面形貌、分子振动模式和光吸收特性的影响。结果表明:共沉积Ag层不仅显著地影响了WO_3薄膜的Raman谱和光吸收特性,而且分布在薄膜表层和内层的Ag粒子能有效地修饰WO_3薄膜表面微观结构,为改善WO_3薄膜的结构和光学特性提供了一种有效的方法。WO3 and Ag-dispersed WO3 films were deposited on glass substrates by the magnetron sputtering of WO3 ceramic and metal Ag targets. SEM,XRD,Raman and UV-Vis spectra were used to investigate the effects of co-deposited Ag layers,which were dispersed in the surface and the interior of the WO3 films,respectively,on the surface morphology,molecular vibration modes and optical absorption properties. The experimental results show that not only Raman spectra and optical absorption behaviors of the WO3 films are evidently influenced but also the surface morphology of the WO3 film can be effectively modified by the Ag nano-particles dispersed in the surface and the interior. This work provides an effective method to modify the structure and optical properties of the WO3 thin film.

关 键 词：共沉积 WO3薄膜 表面形貌 光吸收 RAMAN谱 

分 类 号：TB321[一般工业技术—材料科学与工程]