等倾与相移两种干涉仪的平面度绝对测量比对  

Absolute Measurement Comparison between Isoclinic Interferometer and Phase Shift Interferometer

作　　者：王青[1] 顾洋 WANG Qing;GU Yang(Nanjing University of Science and Technology,Nanjing 201194,China)

机构地区：[1]南京理工大学,江苏南京210094

出　　处：《计测技术》2018年第2期30-33,共4页Metrology & Measurement Technology

基　　金：国家重大仪器专项开发(2013YQ150829)

摘　　要：采用三平面互检测量方法,分别在等倾干涉仪和相移干涉仪上对平晶平面度进行了绝对测量比对。针对两种干涉仪不同的测量原理,提出了一种规范方法以从相移干涉仪数十万点阵测量数据中,提取符合等倾干涉仪测量数据格式的结果;对比等倾干涉仪的结构与环境控制方法,研究了相移干涉仪进行平面度绝对检验过程中的温度、温度梯度、温度分层情况,采取双重保温措施下达到了0.002μm的测量重复性,和0.01μm的绝对检验测量不确定度。与等倾干涉仪的检定结果的差异小于0.01μm,证明了相移干涉仪用于平晶的平面度检定工作可行性。Based on the method of three-flat testing,the comparison of flatness measurement was given by two kinds of instruments which are isoclinic interferometer and phase shift interferometer. With the study of two principles of two kinds of interferometers,a standard process was put forward to extract a few figures from the lattice data tested by phase shift interferometer to fit the data format from isoclinic interferometer. Temperature,temperature gradient and temperature stratification on an optical platform was researched,a comparison of the environmental control method of isoclinic interferometer,the double insulation structure of the cavity of phase shift interferometer was applied. The measurement repeatability was 0. 002 μm and uncertainty of absolute measurement was 0. 01 μm. And comparing with the result of equal inclination interferometer,the difference was less than 0. 01μm. Therefore,the phase shift interferometer can be used entirely in the flatness verification.

关 键 词：平面度 相移干涉仪 等倾干涉仪 三平面互检 

分 类 号：TB921[一般工业技术—计量学]