瞬态超高压压阻式传感器技术研究  

The Technology Research of Transient Ultra-high Pressure Piezoresistive Sensor

作　　者：张敏华[1] 胡晓红[1] 王育维[1] 屈洁[1] 张薇薇[1] ZHANG Minhua;HU Xiaohong;WANG Yuwei;QU Jie;ZHANG Weiwei(Nothwest Institute of Mechanical and Electrical Engineering,Xianyang 712099,China)

机构地区：[1]西北机电工程研究所,陕西咸阳712099

出　　处：《计测技术》2018年第2期34-37,共4页Metrology & Measurement Technology

基　　金：国防基础科研项目(JCKY2017208C015)

摘　　要：针对现有压力传感器不能满足高压、高温、高冲击等恶劣环境下高膛压测试的现状,提供了一种瞬态超高压压阻式传感器。该传感器利用惠斯通半桥式工作原理,选用具有良好压阻效应的硅锗锰铜丝作为敏感元件材料,通过改进制作工艺和装配方式,使该传感器能够承受瞬态高压、高温,实现对0~800 MPa动态压力测试。对比分析表明:在高、低、常温状态下,该传感器非线性误差均不大于0.5%,具有灵敏度高、体积小、安装灵活方便的特点,可广泛应用于高膛压火炮及高压密闭爆发器试验装置的压力测试与研究。Aimed at the problems of that present pressure sensor can not adapt high pressure testing in high pressure,high temperature and high impact environment,a transient ultra-high pressure piezoresistive sensor was provided. The sensor works with the Wheatstone half bridge,sensitive element is made of well-piezoresistive alloy manufactured by Si Ge Mn Cu,by improving the production process and assembly method,the sensor can realize 0 ~ 800 MPa dynamic pressure testing in transient high pressure and high temperature environment. The contrast analysis shows that the nonlinear error of the sensor is not greater than 0. 5% at the high,low and normal temperature respectively,the sensor has a high sensitivity,small volume and flexible installation advantages. It can be widely used in pressure testing and research of high pressure gun and airtight exploder device.

关 键 词：高膛压 传感器 敏感元件 非线性误差 标定 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]