多场耦合下PLZT陶瓷光致电场效应及其应用  

Research of Photo-Induced Electric Field of PLZT Ceramic under Coupling Multi-Fields and Its Application

作　　者：黄家瀚 张崇 王骥[1] 王新杰[2] HUANG Jiahan;ZHANG Chong;WANG Ji;WANG Xinjie(College of Mechanical and Mechanics,Ningbo University,Ningbo Zhejiang 315211,China;School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]宁波大学机械工程与力学学院,浙江宁波315211 [2]南京理工大学机械工程学院,南京210094

出　　处：《传感技术学报》2018年第6期872-879,共8页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51675282);浙江省教育厅科研计划项目(Y201635851);宁波大学科研基金项目(XYL17006)

摘　　要：针对现有数学模型对高能紫外光束照射下PLZT陶瓷光生电压实验变化规律无法进行合理解释的问题,基于多物理场耦合机制分析构建了PLZT陶瓷多场耦合下的光致电场数学模型,并对光致电场实验曲线进行了理论分析,然后针对光生电压控制提出了单片PLZT陶瓷ON-OFF闭环控制和双片PLZT陶瓷双光源协调激励控制策略,取得了较好的控制效果,探讨了PLZT陶瓷作为光控非接触式电动势源的可行性以及在微机电系统供能器件的应用前景,在此基础上,提出了光电-静电复合驱动微镜和PLZT陶瓷-介电弹性薄膜复合驱动的光控微泵装置。The photo-induced voltage variation law of PLZT ceramic illuminated by high-energy ultraviolet can＇t be explained appropriately based on the current mathematical model. Concerning this issue,the mathematical model of photo-induced electric field with the coupling multiple energy fields was constructed according to the multi-physics coupling mechanism,based which the experimental phenomenon of photo-induced voltage was analyzed theoretically.And then,the ON-OFF closed-loop control for single piece PLZT and the dual light sources coordinated irradiating control for PLZT bimorph were proposed and verified well control effect experimentally. The feasibility of PLZT ceramic as an optically non-contact control electromotive force source and the application prospect as an energy supplying device in MEMS system were discussed. On this basis the photovoltaic-electrostatic hybrid actuated micromirror and the PLZT-Dielectric film hybrid driven optically operated micropump were proposed.

关 键 词：PLZT陶瓷 多物理场耦合 光致电场 复合驱动微镜 光控微泵 

分 类 号：TP393[自动化与计算机技术—计算机应用技术]