多弧离子镀-磁控溅射复合技术制备TiCN薄膜的耐蚀性研究（英文）  

Corrosion Resistance of TiCN Films Prepared with Combining Multi-arc Ion Plating and Magnetron Sputtering Technique

作　　者：任鑫[1] 赵瑞山[1] 王玮[1] 宋晓龙[1] 张洋[1] 张翀翊 Ren Xin;Zhao Ruishan;Wang Wei;Song Xiaolong;Zhang Yang;Zhang Chongyi(Liaoning Technical University,Fuxin 123000,China)

机构地区：[1]辽宁工程技术大学,辽宁阜新123000

出　　处：《稀有金属材料与工程》2018年第7期2028-2036,共9页Rare Metal Materials and Engineering

基　　金：Science and Technology Research Project of Education Department of Liaoning Province(LJYL007)

摘　　要：采用多弧离子镀-磁控溅射复合技术在AISI304不锈钢基体表面于Ar和N_2混合气氛下共溅射钛靶和石墨靶制备了TiCN薄膜,研究了占空比对TiCN薄膜结构和在3.5%NaCl(质量分数)中耐蚀性的影响规律。结果表明:所沉积的TiCN薄膜表面光滑、均匀致密,主要形成具有Ti-(C,N)键的fcc-TiN型结构和少量的α-CN_x化合物,并随着占空比的增加表现出(111)晶面择优取向。TiCN薄膜相比于基体表现出更好的耐蚀性能,且随着占空比的增大,薄膜的耐蚀性逐渐提高。当占空比为40%时,TiCN薄膜表现出最为优异的抗腐蚀性能,其自腐蚀电流密度(i_(corr))和极化电阻(R_p)分别为3.262×10^(-7)A·cm^(-2)和238.4kΩ·cm^2。薄膜的阻抗谱显示腐蚀离子的渗透行为和局部腐蚀过程是影响电极体系腐蚀反应过程中的主要动力学因素,这与极化曲线的分析结果相一致。TiCN films were deposited on AISI 304 stainless steel substrate by combining multi-arc ion plating and magnetron sputtering technique with ionizing titanium and graphite targets in an Ar＋N2 mixture gas. The effect of duty ratio on the microstructure and corrosion resistance of TiCN films in a NaCl 3.5 wt% solution was investigated. The results show that the as-deposited films exhibit smooth, uniform and dense morphologies, mainly forming a fcc-TiN type structure with Ti-（C, N） bond as well a as few α-CN_x, and present（111） preferred orientation with the increase of duty ratio. TiCN films display a better resistance to corrosion than the bare substrate; as the duty ratio increases, the corrosion resistance is enhanced gradually. When the duty ratio is40%, the TiCN film shows the optimal corrosion resistance with a corrosion current density（i_（corr）） of 3.262×10^（-7） A·cm^（-2） and a polarization resistance（R_p） of 238.4 kΩ·cm^2. Electrochemical impedance spectroscopy（EIS） of the films also indicates that the penetration behavior of corrosive ions and the local corrosion process are two key factors affecting the electrode corrosion reaction kinetics process, which is consistent with the polarization curves analyses.

关 键 词：TiCN薄膜 多弧离子镀和磁控溅射技术 占空比 耐蚀性 

分 类 号：TG174.4[金属学及工艺—金属表面处理]