The effect of parasitic charge on the output stability of MEMS gyroscopes  

作　　者：Nan Liu Yan Su Xin Tong Guowei Han Chaowei Si Zhaofeng Li Jin Ning 

机构地区：[1]The Research Center of Engineering for Semiconductor Integration Technology, Institute of Semiconductors, Chinese Academy of Sciences [2]College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences [3]School of Microelectronics, University of Chinese Academy of Sciences [4]School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences [5]State Key Laboratory of Transducer Technology, Chinese Academy of Sciences

出　　处：《Journal of Semiconductors》2018年第8期47-52,共6页半导体学报（英文版）

基　　金：supported by the National Natural Science Foundation of China(No.61504130)

摘　　要：Output voltage drifting was observed in MEMS gyroscopes. Other than the quadrature error, frequency mismatch and quality factor, the dielectric parasitic charge was thought to be a major determinant. We studied the mechanism and variation of the parasitic charge in the MEMS gyroscopes, and analyzed the effect of the parasitic charge on the output stability. This phenomenon was extremely obvious in the Pyrex encapsulated MEMS gyroscopes. Due to the DC voltage required for the electrostatic actuation, the parasitic charge in the dielectric layer would accumulate and induce a residual voltage. This voltage had an impact on the resonant frequency of the gyroscopes, so as to affect the output stability. The theoretical studies were also confirmed by our experimental results. It was shown that the parasitic charge was harmful to the output stability of MEMS gyroscopes.Output voltage drifting was observed in MEMS gyroscopes. Other than the quadrature error, frequency mismatch and quality factor, the dielectric parasitic charge was thought to be a major determinant. We studied the mechanism and variation of the parasitic charge in the MEMS gyroscopes, and analyzed the effect of the parasitic charge on the output stability. This phenomenon was extremely obvious in the Pyrex encapsulated MEMS gyroscopes. Due to the DC voltage required for the electrostatic actuation, the parasitic charge in the dielectric layer would accumulate and induce a residual voltage. This voltage had an impact on the resonant frequency of the gyroscopes, so as to affect the output stability. The theoretical studies were also confirmed by our experimental results. It was shown that the parasitic charge was harmful to the output stability of MEMS gyroscopes.

关 键 词：dielectric parasitic charge micro-electro-mechanical system(MEMS) gyroscopes frequency drift DC voltage 

分 类 号：TM63[电气工程—电力系统及自动化] TN304.23[电子电信—物理电子学]