RF MEMS开关的研究进展及其应用  

Research Progresses and Applications of RF MEMS Switches

作　　者：黄成远 张斌珍[1] 段俊萍[1] 王雄师 徐永庆 Huang Chengyuan;Zhang Binzhen;Duan Junping;Wang Xiongshi;Xu Yongqing(Key Laboratory of Instrumentation Science ＆ Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室

出　　处：《微纳电子技术》2018年第9期652-659,共8页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(U1637212);装备预研领域基金资助项目(61404130402)

摘　　要：射频微电子机械系统（RF MEMS）开关是射频电子系统中的关键器件,首先简要介绍了RF MEMS开关的结构特点及分类方式,综述了RF MEMS开关的发展现状,列举了国内著名科研机构具有代表性的成果,并对比了其结构特点及性能参数,指出国内RF MEMS开关正向着小体积、宽频化、低驱动电压、高性能指标的方向发展。此外,还阐述了RF MEMS开关在多位移相器、可调滤波器、可重构天线等方面的应用,其在与多器件的集成和联合运用中潜力巨大。最后,分析了现有的RF MEMS开关的发展瓶颈,并展望了其以设计新结构、探寻新材料、探索新工艺、多种驱动方式相结合、多器件相集成为未来发展新方向。研发制作新的RF MEMS开关及其功能系统必将会对射频微波领域造成巨大影响。Radio frequency（RF）micro-electromechanical system（MEMS）switches are the key components in RF electronic systems.The structural characteristics and classification of the RF MEMS switches are firstly introduced in brief,and the development status of the RF MEMS switches is reviewed.The representative achievements of famous domestic scientific research institutions are listed,and their structural characteristics and performance parameters are compared.The domestic RF MEMS switches are developing towards the direction of small volume,broadband,low drive voltage and high performance.Besides,the applications of the RF MEMS switches in multibit phase shifters,tunable filters and reconfigurable antennas are elaborated,RF MEMS switches have unlimited potential in the integration and combination with multiple devices.Finally,the development bottleneck of the existing RF MEMS switches is analyzed,and their future development new direction is prospected,i.e.designing new structures,searching new materials,exploring new manufacture technology,combining various driving modes and integrating multiple devices.The research and development of the new RF MEMS switches and their functional systems will have great influence on the fields of radio frequency and microwave.

关 键 词：射频微电子机械系统(RF MEMS)开关 移相器 可调滤波器 可重构天线 微波 

分 类 号：TN63[电子电信—电路与系统] TH703[机械工程—仪器科学与技术]