小型磁偏转质谱计性能实验研究  

Performance Study of Miniature Magnetic Sector Mass Spectrometer

作　　者：董猛[1] 成永军[1] 孙雯君[1] 郭美如[1] 李刚[1] 李亚丽 韩晓东 DONG Meng;CHENG Yong-jun;SUN Wen-jun;GUO Mei-ru;LI Gang;LI Ya-li;HAN Xiao-dong(Science and Technology on Vacuum TechnologT and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《宇航计测技术》2018年第4期28-31,48,共5页Journal of Astronautic Metrology and Measurement

基　　金：国自然科学基金资助项目(61471184);甘肃省科技计划资助(18JR3RA413)

摘　　要：自主研发了小型磁偏转质谱计,并对其质量范围、分辨本领、灵敏度和最小可检分压力四个主要性能指标进行了实验测试和比对。结果表明,该质谱计的质量范围为(1~143)amu,相对N2的分辨本领为1400,灵敏度为4.2×10^(-5)A/Pa,最小可检分压力为9.5×10^(-7)Pa。该测试和比对结果为磁偏转质谱计进一步的优化设计和性能提高奠定了重要基础。A new Miniature Magnetic Sector Mass Spectrometer has been developed. The key performance indexes of the instrument were tested and compared including mass range,resolution,sensitivity and the minimum detectable partial pressure. The result shows that the mass spectrometer can record mass range from 1 to 143 amu. The instrument provides resolving power of about 1400 at full width half maximum（ FWHM） and demonstrates an sensitivity of 4.2×10^（-5） A/Pa for nitrogen. And the minimum detectable partial pressure is measured to be 9.5×10^（-7） Pa. The results lay a solid foundation for the further performance improvement of magnetic sector mass spectrometer in the future.

关 键 词：磁偏转质谱计 质量范围 分辨本领 灵敏度 最小可检分压力 

分 类 号：TB773[一般工业技术—真空技术]