固溶处理对新型Fe-Ni-Cr-Ti合金组织及性能的影响  

Influence of solution treatment on microstructure and properties of a new type Fe-Ni-Cr-Ti alloy

作　　者：朱亚辉 李永友 王东哲 王方军 赵安中 刘海定 ZHU Yahui;LI Yongyou;WANG Dongzhe;WANG Fangjun;ZHAO Anzhong;LIU Haiding(Chengdu Caic Electronics Co.Ltd.,Chengdu 610091,China;Chongqing Materials Research Institute Co.Ltd.,Chongqing 400707,China;National Instrument Functional Materials Engineering Technique Research Center,Chongqing 400707,China)

机构地区：[1]成都凯天电子股份有限公司,成都610091 [2]重庆材料研究院有限公司,重庆400707 [3]国家仪表功能材料工程技术研究中心,重庆400707

出　　处：《功能材料》2018年第8期8211-8216,共6页Journal of Functional Materials

基　　金：国家科技重大专项资助项目(2017ZX06004004);重庆市重点产业共性关键技术创新专项资助项目(cstc2015zdcyztzx50002)

摘　　要：新型Fe-Ni-Cr-Ti恒弹性合金主要应用于压力传感器,针对此新型压力传感器超薄壁(壁厚0.05 mm以下)的特点,为满足元件漏气率达到10^(-7) Pa·L/S数量级、拟合精度达到万分之十FS的精度水平,细小、均匀的组织及性能一致性好的原材料棒材起到至关重要的作用。研究了原材料的不同固溶温度、不同保温时间的热处理工艺对合金金相显微组织的影响。结果表明,原材料冷拔前棒坯固溶温度采取1 000℃×60min,水冷,再经过一定的冷拔变形,最终原材料冷拔棒晶粒度能够优于5级,得到细小均匀的显微组织,有利于制备出振动特性优异的传感器,满足元件漏气率与拟合精度的指标要求。The new type Fe-Ni-Cr-Ti alloy mainly used in pressure sensors.Follow this new type pressure sensor＇s characteristics of ultra-thin wall,in order to get the accuracy level of leak rate reach 10（-70 Pa·L/S order of magnitude and the fitting precision reach within ten in ten thousand FS,the raw material bar with fine and uniform microstructure and consistency of performance plays a key role.This paper research the influence on microstructure of the heat treatment process with different solution temperature and different solution time.The results shows that the grain size of the raw material bar quenched at 1 000 ℃×60 min before a certain cold deformation is 5 or smaller,which achieve the desired goal of fine and uniform microstructure,it is beneficial to prepare sensors with excellent vibration characteristics,and satisfy the element＇sperformance index of leak rate fitting precision.

关 键 词：恒弹性合金 传感器 热处理 漏气率 拟合精度 晶粒度 

分 类 号：TB34[一般工业技术—材料科学与工程] TG141[金属学及工艺—金属材料]