国产四极质谱仪的研发  

Development of Domestic Quadrupole Mass Spectrometer

作　　者：杨云[1] 徐宁[1] 董华军[1] 臧侃[1] 郭方准[1] YANG Yun;XU Ning;DONG Huajun;ZANG Kan;GUO Fangzhun(School of Mechanical Engineering,Dalian Jiaotong University,Dalian 116028,China)

机构地区：[1]大连交通大学机械工程学院,辽宁大连116028

出　　处：《大连交通大学学报》2018年第4期67-71,共5页Journal of Dalian Jiaotong University

基　　金：辽宁省教育厅科学研究计划资助项目(JDL2017032)

摘　　要：介绍了自主研发的四极质谱仪原理、设计和相关测试结果.四极质谱仪主要由离子源、四极滤质器、离子检测机构、控制电源和信号处理软件构成.离子源产生的气相离子经引出和加速后射入四极滤质器中,四极滤质器上相叠加的直流和交流电压使得相对应质荷比的离子穿过后被离子检测机构检测,从而获得气体的成分和分压.测试结果显示,该四极质谱仪的质量测量范围可达65amu,基本性能良好.The principle,design and test results of domestic quadrupole mass spectrometer are described. It is mainly composed of an ion generating mechanism,a quadrupole mass filter,an ion detection mechanism,a control power supply and a matching software. The ions produced by the ion generating mechanism are accelerated and entered the quadrupole mass filter. The ions with specific mass can pass through the quadrupole having superposition of DC and AC voltages and then are detected by a Faraday cup. The test results show that the quadrupole mass spectrometer can analyze residual gases accurately with high sensitivity,and the present maximum mass measurement is 65 amu.

关 键 词：质谱仪 四极滤质器 电场扫描 残余气体分析 

分 类 号：TH843[机械工程—仪器科学与技术]